Disposable PDMS diaphragm Micropump actuated by PZT

Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Volumn , Issue , 2006, Pages 1436-1439

  Geng, Zhao Xin ^a   Cui, Da Fu ^a   Wang, Hai Ning ^a   Chen, Xing ^a  

^a INSTITUTE OF ELECTRONICS   (China)

Author keywords

MEMS; Micropump; Microvalve; PDMS; PZT

Indexed keywords

DIAPHRAGMS; MICROCHANNELS; MICROFLUIDICS; MOLECULES; NANOFLUIDICS; NEMS; OPTICAL DESIGN; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; PLATES (STRUCTURAL COMPONENTS); PROCESS DESIGN; PROCESS ENGINEERING; SEMICONDUCTING LEAD COMPOUNDS; SWITCHING FUNCTIONS; VALVES (MECHANICAL);

(100) SILICON; (MIN ,MAX ,+) FUNCTIONS; ACTIVE VALVES; BACK PRESSURES; BASE PLATES; BI MORPH ACTUATORS; CHECK VALVES; DRIVING VOLTAGES; FABRICATION PROCESSES; FLOW DIRECTIONS; INTERNATIONAL CONFERENCES; MICRO PUMPING; MICROFLUIDIC CONTROL; MICROPUMP AND MICROVALVE; MOLECULAR SYSTEMS; PDMS DIAPHRAGM; PUMP RATE; SQUARE WAVE (SW); WORKING PRINCIPLES;

PUMPS;

EID: 46149111691     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2006.334783     Document Type: Conference Paper

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