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Volumn 518, Issue 24, 2010, Pages 7245-7248
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Preparation and characterization of ruthenium films via an electroless deposition route
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Author keywords
Electroless deposition; Ruthenium; Ruthenium oxide
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Indexed keywords
AS-DEPOSITED FILMS;
ELECTROLESS DEPOSITION;
HETEROGENEOUS NUCLEATION;
HYDROGEN REDUCTION;
PARTIAL DETACHMENT;
PLANAR IMAGES;
RU FILM;
RUTHENIUM FILMS;
RUTHENIUM OXIDE;
SCANNING ELECTRON MICROSCOPE;
SI SUBSTRATES;
SMOOTH SURFACE;
SOLID FILMS;
SURFACE CRACKS;
VOLUME CONTRACTION;
XPS;
XRD;
COPPER;
FILM GROWTH;
HYDROGEN;
RUTHENIUM;
RUTHENIUM ALLOYS;
RUTHENIUM COMPOUNDS;
SCANNING ELECTRON MICROSCOPY;
SURFACE DEFECTS;
SURFACE ROUGHNESS;
X RAY DIFFRACTION;
X RAY PHOTOELECTRON SPECTROSCOPY;
FILM PREPARATION;
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EID: 77956881693
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2010.04.086 Document Type: Conference Paper |
Times cited : (13)
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References (19)
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