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Volumn 518, Issue 24, 2010, Pages 7245-7248

Preparation and characterization of ruthenium films via an electroless deposition route

Author keywords

Electroless deposition; Ruthenium; Ruthenium oxide

Indexed keywords

AS-DEPOSITED FILMS; ELECTROLESS DEPOSITION; HETEROGENEOUS NUCLEATION; HYDROGEN REDUCTION; PARTIAL DETACHMENT; PLANAR IMAGES; RU FILM; RUTHENIUM FILMS; RUTHENIUM OXIDE; SCANNING ELECTRON MICROSCOPE; SI SUBSTRATES; SMOOTH SURFACE; SOLID FILMS; SURFACE CRACKS; VOLUME CONTRACTION; XPS; XRD;

EID: 77956881693     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2010.04.086     Document Type: Conference Paper
Times cited : (13)

References (19)
  • 12
    • 77956876317 scopus 로고    scopus 로고
    • K.I. Popov, S.S. Djokic, and B.N. Grgur 2002 Kluwer Academic/Plenum Publishers New York
    • K.I. Popov, S.S. Djokic, and B.N. Grgur 2002 Kluwer Academic/Plenum Publishers New York
  • 15
    • 0003715129 scopus 로고    scopus 로고
    • Version 3.5 (National Institute of Standards and Technology, Gaithersburg
    • NIST X-ray Photoelectron Spectroscopy Database, Version 3.5 (National Institute of Standards and Technology, Gaithersburg, 2003); http://srdata.nist. gov/xps
    • (2003) NIST X-ray Photoelectron Spectroscopy Database


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.