SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 518, Issue 24, 2010, Pages 7519-7522

Analysis on microstructure and characteristics of TiAlN/CrN nano-multilayer films deposited by cathodic arc deposition

(5) Sun, P L a Hsu, C H b Liu, S H b Su, C Y c Lin, C K a

a FENG CHIA UNIVERSITY (Taiwan)

b TATUNG UNIVERSITY (Taiwan)

c NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY (Taiwan)

Author keywords

Abrasion; Cathodic arc deposition; Corrosion resistance; CrN; TiAlN

Indexed keywords

ABRASION RESISTANCE; AS-DEPOSITED FILMS; CATHODIC ARC DEPOSITION; COATING HARDNESS; CORROSION TESTS; CRN; MODULUS RATIO; MULTI-LAYER THIN FILM; MULTILAYER STRUCTURES; NANO SCALE; NANO-MULTILAYER FILM; PARALLEL ORIENTATION; ROTATION SPEED; SUBSTRATE ORIENTATION; SUBSTRATE SURFACE; TARGET SURFACE; TIALN;

ABRASION; COATINGS; CORROSION RESISTANCE; DEPOSITION; FILM PREPARATION; MICROSTRUCTURE; MULTILAYERS; ROTATION; SCANNING ELECTRON MICROSCOPY; STAINLESS STEEL; TRIBOLOGY; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

MULTILAYER FILMS;

EID: 77956873716 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2010.05.037 Document Type: Conference Paper

Times cited : (35)

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