Chapter 3 Misfit Strain and Accommodation in SiGe Heterostructures

Semiconductors and Semimetals

Volumn 56, Issue C, 1998, Pages 101-167

  Hull, R ^a  

^a University of Virginia   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MISFIT STRAINS;

SI-GE ALLOYS;

EID: 77956656837     PISSN: 00808784     EISSN: None     Source Type: Book Series    
DOI: 10.1016/S0080-8784(08)62581-8     Document Type: Chapter

References (161)

1. Albrecht M., Strunk H.P., Hull R., and Bonar J.M. Appl. Phys. Lett 62 (1993) 2206
2. Albrecht M., Christiansen S., and Strunk H.P. Phys. Stat. Sol. (a) 150 (1995) 453
3. Alexander H., and Haasen P. Solid State Physics V (1968) 22
4. Bacon D.J., and Crocker A.G. Phil. Mag. 12 (1965) 195
5. Baribeau J.M. J. Appl. Phys. 74 (1993) 3805
6. Bean J.C., Feldman L.C., Fiory A.T., Nakahara S., and Robinson I.K. J. Vac. Sci. Technol. A2 (1984) 436
7. Beanland R. J. Appl. Phys. 77 (1995) 6217
8. Beltz G.B., and Freund L.B. Philos. Mag. A69 (1994) 183
9. Bilby B.A., Bullough R., and Smith E. Proc. Roy. Soc A231 (1955) 263
10. Bonar J.M., Hull R., Walker J.F., and Malik R. Appl. Phys. Lett. 60 (1992) 1327
11. Bourret A., and Desseaux J. Phil. Mag. A39 (1979) 405
12. Cammarata R.C., and Sieradzki K. J. Appl. Phys. Lett. 55 (1989) 1197
13. Capano M.A. Phys. Rev. B45 (1992) 11768
14. Chang S.J., Arbet V., Wang K.L., Bowman Jr. R.C., Adams P.M., Nayak D., and Woo J.C.C. J. Elec. Mat. 19 (1990) 125
15. Cherns D., and Stowell M.J. Thin Solid Films 29 (1975) 107-127
16. Thin Solid Films 37 (1976) 249
17. Chidambarrao D., Srinivasan G.R., Cunningham B., and Murthy C.S. Appl. Phys. Lett 57 (1990) 1001
18. Cockayne D.J.H., and Hons A. J. Physique Colloq. 40 (1979) C6
19. Cullis A.G., Robbins D.J., Barnett S.J., and Pidduck A.J. J Vac. Sci. Technol. A12 (1994) 1924
20. Cullis A.G., Pidduck A.J., and Emery M.T. Phys. Rev. Lett. 75 (1995) 2368
21. Currie M.T., Samavedam S.B., Langdo T.A., Leitz C.W., and Fitzgerald E.A. Appl. Phys. Lett. 62 (1998) 1718
22. DeCoteau M.D. Wilshaw P.R. Falster R. Proc. of 16th International Conference on Defects in Semiconductors, Materials Science Forum 83-87 1992 185
23. Dismukes J.P., Ekstrom L., and Paff R.J. J. Phys. Chem. 68 (1964) 3021
24. Dixon R.H., and Goodhew P.J. J. Appl. Phys. 68 (1990) 3163
25. Dodson B.W. Appl. Phys. Lett 53 (1988) 37
26. Dodson B.W., and Tsao J.Y. Appl. Phys. Lett 51 (1987) 1325
27. Dodson B.W., and Tsao J.Y. Appl. Phys. Lett 53 (1988) 2498
28. Dregia S.A., and Hirth J.P. J. Appl. Phys. 69 (1991) 2169
29. Dupuis R.D., Bean J.C., Brown J.M., Macrander A.T., Miller R.C., and Hopkins L.C. J. Elec. Mat. 16 (1986) 69
30. Eaglesham D.J., Kvam E.P., Maher D.M., Humphreys C.J., and Bean J.C. Phil. Mag. A59 (1989) 1059
31. Fiory A.T., Bean J.C., Hull R., and Nakahara S. Phys. Rev. B31 (1985) 4063
32. Fischer A., and Richter H. Appl. Phys. Lett 64 (1994) 1218
33. Fitzgerald E.A., Kirchner P.D., Proano R., Petit G.D., Woodall J.M., and Ast D.G. Appl. Phys. Lett. 52 (1988) 1496
34. Fitzgerald E.A., Watson G.P., Proano R.E., Ast D.G., Kirchner P.D., Pettit G.D., and Woodall J.M. J. Appl. Phys. 65 (1989) 2220
35. Fitzgerald E.A., Xie Y.H., Green M.L., Brasen D., Kortan A.R., Michel J., Mie Y.J., and Weir B.E. Appl. Phys. Lett 59 (1991) 811
36. Fitzgerald E.A., and Samavedam S.B. Thin Solid Films 294 (1997) 3
37. Fox B.A., and Jesser W.A. J. Appl. Phys. 68 (1990) 2801
38. Frank F.C., and Van der Merwe J.H. Proc. Roy. Soc A198 (1949) 205
39. Proc. Roy. Soc A198 (1949) 216
40. Frank F.C., and Van der Merwe J.H. Proc. Roy. Soc A200 (1949) 125
41. Frank F.C., and Read W.T. Symposium on Plastic Deformation of Crystalline Solids (1950), Carnegie Institute of Technology, Pittsburgh 44
42. Freund L.B. J. Appl. Phys. 68 (1990) 2073
43. Fritz I.J. Appl. Phys. Lett 51 (1987) 1080
44. Frost H.J., and Ashby M.F. Deformation Mechanism Maps (1982), Pergamon, Oxford, England
45. George A., and Rabier J. Revue Phys. Appl 22 (1987) 1941
46. Gibbings C.J., Tuppen C.G., and Higgs V. Mat. Res. Soc 220 (1992) 205
47. Gillard V.T., and Nix W.D. Mat. Res. Soc. Proc 356 (1975) 283
48. Gomez A., Cockayne D.J.H., Hirsch P.B., and Vitek V. Phil. Mag. 31 (1975) 105
49. Gosling T.J., Jain S.C., Willis J.R., Atkinson A., and Bullough R. Phil. Mag. A66 (1992) 119
50. Gosling T.J., Bullough R., Jain S.C., and Willis J.R. J. Appl. Phys. 73 (1993) 8267
51. Gosling T.J., Jain S.C., and Harker A.H. Phys. Stat. Sol. (A) 146 (1994) 713
52. Gosling, T. (1995). Private communication.
53. Green M.X., Weir B.E., Brasen D., Hsieh Y.F., Higashi G., Feygenson A., Feldman L.C., and Headrick R.L. J. Appl. Phys. 69 (1991) 745
54. Grinfeld M.A. and Sorolovitz, D.J. (1995). In Properties of Strained and Relaxed SiGe, E. Kasper IEEE EMIS Datareviews Series No.12, London, England, p. 3-16.
55. Guha S., Madhukar A., Kaviani K., and Kapre R. J. Vac. Sci. Technol. B8 (1990) 149
56. Hagen W., and Strunk H. Appl. Phys. 17 (1978) 85
57. Harame D.L., Comfort J.H., Cressler J.D., Crabbe E.F., Sun Y.-C., Meyerson B.S., and Tice T. IEEE Trans. Elec. Dev. 42 (1995) 455
58. Harame D.L., Comfort J.H., Cressler J.D., Crabbe E.F., Sun Y.-C., Meyerson B.S., and Tice T. IEEE Trans. Elec. Dev. 42 (1995) 469
59. Hauenstein R.J., Miles R.H., Croke E.T., and McGill T.C. Thin Solid Films 183 (1989) 79
60. Heggie M., and Jones R. Inst. Phys. Ser. Conf 87 (1987) Bristol, England: Institute of Physics, 367.
61. Herzog, H.-J. (1995). In Properties of Strained and Relaxed SiGe E. Kasper., IEEE EMIS Datareviews Series No.12, London, England, p. 49-53.
62. Higgs V., Kightley P., Augustus P.D., and Goodhew P.J. Appl. Phys. Lett. 59 (1991) 829
63. Hirsch P.B. J. Physique Colloq. 44 (1981) C3-149
64. Hirth J.R., and Lothe J. Theory of Dislocations. 2nd ed. (1982), John Wiley, New York
65. Houghton D.C., Gibbings C.J., Tuppen C.G., Lyons M.H., and Halliwell M.A.G. Appl. Phys. Lett. 56 (1990) 460
66. Houghton D.C. J. Appl. Phys. 70 (1991) 2136
67. Hsu J.W.R., Fitzgerald E.A., Xie Y.H., and Silverman P.J. Appl. Phys. Lett. 65 (1994) 344
68. Hull R., Bean J.C., Cerdeira F., Fiory A.T., and Gibson J.M. Appl. Phys. Lett. 48 (1986) 56
69. Hull R., and Bean J.C. J. Vac. Sci. Tech. A7 (1989) 2580
70. Hull R., and Bean J.C. Appl. Phys. Lett. 54 (1989) 925
71. Hull R., Bean J.C., Werder D.J., and Leibenguth R.E. Phys. Rev. B40 (1989) 1681
72. Hull R., Bean J.C., and Buescher C. J. Appl. Phys. 66 (1989) 5837
73. Hull R., Bean J.C., Leibenguth R.E., and Werder D.J. J. Appl. Phys. 65 (1989) 4723
74. Hull R., Bean J.C., Bonar J.M., Higashi G.S., Short K.T., Temkin H., and White A.E. Appl. Phys. Lett. 56 (1990) 2445
75. Hull R., Bean J.C., Bahnck D., Peticolas L.J., Short K.T., and Unterwald E.C. J. Appl. Phys. 70 (1991) 2052
76. Hull R., Bean J.C., Noble D., Hoyt J., and Gibbons J.F. Appl. Phys. Lett. 59 (1991) 1585
77. Hull R., Bean J.C., Higashi G.S., Green M.L., Peticolas L., Bahnck D., and Brasen D. Appl. Phys. Lett. 60 (1991) 1488
78. Hull R., and Bean J.C. Phys. Stat. Sol. (A) 138 (1993) 533
79. Hull R., Bean J.C., Peticolas L.J., Bahnck D., Weir B.E., and Feldman L.C. Appl. Phys. Lett 61 (1993) 2802
80. Hull R., Bean J.C., Peticolas L.J., Weir B.E., Prabhakaran K., and Ogino T. Appl. Phys. Lett 65 (1994) 327
81. Hull, R., Quan, Y. Stach, E., Waltz-Flannigan, A., and Yoon, D. (1997). To be published.
82. Ichimura M., and Narayan J. Philos. Mag. A72 (1995) 281
83. Imai M., and Sumino K. Phil. Mag. A47 (1983) 599
84. Jain U., Jain S.C., Harker A.H., and Bullough R. J. Appl. Phys. 77 (1995) 103
85. Van der Merwe J.H., and Jesser W.A. J. Appl. Phys. 64 (1988) 4968
86. Jesson D.E., Pennycook S.J., Baribeau J.-M., and Houghton D.C. Phys. Rev. Lett. 71 (1993) 1744
87. Jesson D.E., Chen K.M., Pennycook S.J., Thundat T., and Warmack R.J. Science 268 (1995) 1161
88. Jones R., Umerski A., Sitch P., Heggie M.L., and Oberg S. Phys. Stat. Sol. (A) 138 (1993) 369
89. Kamat S.V., and Hirth J.P. J. Appl. Phys. 67 (1990) 6844
90. Kasper E., Herzog H.-J., and Kibbel H. Appl. Phys. 8 (1975) 199
91. Kasper E., and Schaffler F. In: Pearsall T.P. (Ed). Strained Layer Superlattices: Materials Science and Technology, Semiconductors and Semimetals 33 (1991), Academic Press, San Diego, CA 223-311
92. Knall J., Romano R.T., Biegelsen D.K., Bringans R.D., Chui H.C., Harris Jr. J.S., Treat D.W., and Bour D.P. 1. Appl. Phys. 76 (1994) 2697
93. Kolar H.R., Spence J.C.H., and Alexander H. Phys. Rev. Lett. 77 (1996) 4031
94. Kusters K.H., and Alexander H. Physica 116B (1983) 594
95. Kvam E.P., Eaglesham D.J., Maher D.M., Humphreys C.J., and Bean J.C. Proc. Mat. Res. Soc 104 (1988) 623
96. Kvam E.P., Maher D.M., and Humphreys C.J. J. Mater. Res. 5 (1990) 1900
97. Kvam E.P. Phil. Mag. Lett 62 (1990) 167
98. Landolt-Bornstein. Numerical Data and Functional Relationships in Science and Technology 17a (1982), Springer, Berlin New Series, Group III
99. Lee H.P., Huang Y.-H., Liu X., Lin H., Smith J.S., Weber E.R., Yu P., Wang S., and Lilliental-Weber Z. Proc. Mat. Res. Soc 116 (1988) 219
100. Lefebvre A., Herbeaux C., Boillet C., and Di Persio J. Phil. Mag. Lett 63 (1991) 23
101. LeGoues F.K., Meyerson B.S., and Morar J.F. Phys. Rev. Lett. 66 (1991) 2903
102. LeGoues F.K., Meyerson B.S., Morar J.F., and Kirchner P.D. J. Appl. Phys. 71 (1992) 4230
103. LeGoues F.K., Mooney P.M., and Tersoff J. Phys. Rev. Lett. 71 (1993) 396
104. Li J.H., Koppensteiner E., Bauer G., Hohnisch M., Herzog H.J., and Schaffler F. Appl. Phys. Lett. 67 (1995) 223
105. Liliental-Weber Z., Weber E.R., Washburn J., Liu T.Y., and Kroemer H. Proc. Mat. Res. Soc. 91 (1987) 91
106. Lockwood D.J., Baribeau J.-M., and Labbe H.J. Can. J. Phys. 70 (1992) 852
107. McVay G.L., and DuCharme A.R. Phys. Rev. B9 (1974) 627
108. Marklund S. Solid State Commun. 54 (1985) 555
109. Matthews J.W. J. Vac. Sci. Technoi 12 (1975) 126 (and references contained therein).
110. Matthews J.W., and Blakeslee A.E.J. Cryst. Growth 27 (1974) 118
111. Matthews J.W., and Blakeslee A.E. J. Cryst. Growth 29 (1975) 273
112. Matthews J.W., and Blakeslee A.E. J. Cryst. Growth 32 (1976) 265
113. Matthews J.W., Blakeslee A.E., and Mader S. Thin Solid Films 33 (1976) 253
114. Matyi R.J., Shichijo H., and Tsai H.L. J. Vac. Sci. Technoi. B6 (1988) 699
115. Moller H.-J. Acta. Met. 26 (1978) 963
116. Mooney P.M., Jordan-Sweet J.L., Chu J.O., and LeGoues E.K. Appl. Phys. Lett. 66 (1995) 3642
117. Nandedkar A.S., and Narayan J. Philos. Mag. A61 (1990) 873
118. Narayan J., and Sharan S. Mat Sci. and Eng. B10 (1991) 261
119. Nititenko V.I., Farber B.Y., and Iunin Y.L. Sov. Phys. JETP 66 (1988) 738
120. Nix W.A., Noble D.B., and Turlo J.F. Proc. Mat. Res. Soc 188 (1990) 315
121. Noble D.B., Hoyt J.L., King C.A., and Gibbons J.F. Appl. Phyts. Lett. 56 (1990) 51
122. Noble D.B., Hoyt J.L., Nix W.D., Gibbons J.F., Laderman S.S., Turner J.E., and Scott M.P. Appl. Phys. Lett 58 (1991) 1536
123. Olsen G.H., Abrahams M.S., Buiocchi G.J., and Zamerowski T.J. J. Appl. Phys. 46 (1975) 1643
124. Patel J.R., and Chaudhuri A.R. Phys. Rev. 143 (1966) 601
125. Peierls R.E. Proc. Phys. Soc 52 (1940) 23
126. People R., and Bean J.C. Appl. Phys. Lett 47 (1985) 322
127. People R., and Bean J.C. Appl. Phys. Lett. 49 (1986) 229
128. Perovic D.D., and Houghton D.C. Mat. Res. Soc. Proc 263 (1992) 391
129. Pethukov B.V. Semiconductors 29 (1995) 55
130. Rajan K., and Denhoff M. J. Appl. Phys. 62 (1987) 1710
131. Rozgonyi G.A., Saleh A.S.M., Radzimski Z.J., Kola R.R., Honeycutt J., Bean K.E., and Lindbergh K. J. Cryst. Growth 85 (1987) 300
132. Samavedam S.B., and Fitzgerald E.A. J. Appl. Phys. 81 (1997) 3108
133. Schmid E. Z. Elektrochem 37 (1931) 447
134. Schwarz K. Phys. Rev. Lett 78 (1997) 4785
135. Seeger A., and Schiller P. Acta. Metall. 10 (1962) 348
136. Shintani K., and Fujita K. J. Appl. Phys. 75 (1994) 7842
137. Shiryaev S.Yu. Phil. Mag. Lett. 68 (1993) 195
138. Shiryaev S.Yu., Jensen F., and Petersen J.W. Appl. Phys. Lett. 64 (1994) 3305
139. Srolovitz D.J. Acta. Metall 37 (1989) 621
140. Steinkamp D., and Jager W. Phil. Mag. A65 (1992) 1369
141. Stohr H., and Klemm W. Z. Anorg. Allg. Chem. 241 (1939) 305
142. Tersoff J. Appl. Phys. Lett. 62 (1993) 693
143. Tersoff J., and LeGoues F.K. Phys. Rev. Lett. 72 (1994) 3570
144. Thompson N. Proc. Phys. Soc 66B (1953) 481
145. Tongyi Z. Phys. Stat. Sol. (A) 148 (1995) 175
146. Tsao J.Y., and Dodson B.W. Appl. Phys. Lett 53 (1988) 848
147. Tsao J.Y., Dodson B.W., Picreaux S.T., and Cornelison D.M. Phys. Rev. Lett 59 (1988) 2455
148. Tuppen C.G., Gibbings C.J., and Hockly M. J. Cryst. Growth 94 (1989) 392
149. Tuppen C.G., Gibbings C.J., Hockly M., and Roberts S.G. Appl. Phys. Lett 56 (1990) 54
150. Tuppen C.G., and Gibbings C.J. J. Appl. Phys. 68 (1990) 1526
151. Tuppen C.G., Gibbings C.J., and Hockly M. Proc. Mat. Res. Soc 220 (1991) 187
152. Twigg M.E. J Appl. Phys. 68 (1990) 5109
153. Van de Walle G.F.A., Van Ijzendoorn L.J., Van Gorkum A.A., Van den Heuvel R.A., Theunissed A.M.L., and Gravestein D.J. Thin Solid Films 183 (1990) 183
154. Van der Merwe J.H. J. Appl. Phys. 34 (1963) 117
155. Van der Merwe J.H., and Ball C.A.B. In: Matthews J.W. (Ed). Epitaxial Growth, Part b (1975), Academic, New York 493-528
156. Wang, K.L. and Zheng, X. (1995). Properties of Strained and Relaxed SiGe E. Kasper (IEEE EMIS Datareviews Series No. 12, London, England, 1995), p. 70-78, and references therein.
157. Wegscheider W., Eberl K., Menczigar U., and Abstreiter G. Appl. Phys. Lett. 57 (1990) 875
158. Wickenhauser S., Vescan L., Schmidt K., and Luth H. Appl. Phys. Lett. 70 (1990) 324
159. Willis J.R., Jain S.C., and Bullough R. Phil. Mag. A 62 (1990) 115
160. Yamashita Y., Maeda K., Fujita K., Usami N., Suzuki K., Fukatsu S., Mera Y., and Shiraki Y. Phil. Mag. Lett. 67 (1993) 165
161. Yonenaga I., and Sumino K. Appl. Phys. Lett 69 (1996) 1264