Generation of dielectric barrier discharge plasma in supercritical argon for material synthesis

Japanese Journal of Applied Physics

Volumn 49, Issue 7 PART 1, 2010, Pages 0760021-0760024

  Suga, Yosuke ^a   Nakajima, Tsuyoshi ^a   Watanabe, Toshiyuki ^a  

^a TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

A-CARBON; ACTIVE SPECIES; CARBON THIN FILMS; CRITICAL PRESSURES; CRITICAL TEMPERATURES; DIELECTRIC BARRIER DISCHARGE PLASMAS; DIELECTRIC BARRIER DISCHARGES; DISCHARGE PLASMA; ENERGY DISPERSIVE X-RAY SPECTROSCOPY; HIGH FREQUENCY HF; HIGH PRESSURE; LOW PRESSURES; MATERIAL SYNTHESIS; N-PENTANE; OPTICAL EMISSION SPECTRA; PARALLEL-PLATE ELECTRODES; PLASMA DISCHARGE; PLASMA EMISSION; REACTION FIELDS; SEM; SUPERCRITICAL ARGON; WIDE AREA;

ARGON; ATMOSPHERIC PRESSURE; DIELECTRIC DEVICES; ELECTRODES; EMISSION SPECTROSCOPY; ENERGY DISPERSIVE SPECTROSCOPY; FLOW CONTROL; HIGH PRESSURE ENGINEERING; PARAFFINS; PLASMA DIAGNOSTICS; PLASMA STABILITY; PLASMA THEORY; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SYNTHESIS (CHEMICAL); THIN FILMS; X RAY SPECTROSCOPY;

ELECTRIC DISCHARGES;

EID: 77956546428     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.49.076002     Document Type: Article

References (21)

1. M. Kamo, Y. Sato, S. Matsumoto, and N. Setaka: J. Cryst. Growth 62 (1983) 642.
2. T.G. McCauley, D.M. Gruen, and A.R. Krauss: Appl. Phys. Lett. 73 (1998) 1646.
3. L.C. Chen, P.D. Kichambare, K.H. Chen, J.-J. Wu, J.R. Yang, and S.T. Lin: J. Appl. Phys. 89 (2001) 753.
4. R. Noyori, O. Kajimoto, S.C. Tucker, C.J. Peters, K. Gauter, J.F. Brennecke, J.E. Chateauneuf, A. Baiker, P.G. Jessop, T. Ikariya, J.A. Darr, M. Poliakoff, J.L. Kendall, D.A. Canelas, J.L. Young, J.M. DeSimone, C.F. Kirby, M.A. McHugh, P.E. Savage, A.J. Mesiano, E.J. Beckman, and A.J. Russell: Chem. Rev. 99 (1999) 353.
5. A.K. K. Lee, N.R. Bulley, M. Fattori, and A. Meisen: J. Am. Oil Chem. Soc. 63 (1986) 921.
6. R. Bacon: J. Appl. Phys. 31 (1960) 283.
7. S. Liang and D.C. Tilotta: Anal. Chem. 70 (1998) 616.
8. T. Ito and K. Terashima: Appl. Phys. Lett. 80 (2002) 2854.
9. T. Tomai, T. Ito, and K. Terashima: Thin Solid Films 506-507 (2006) 409.
10. A. Kawashima, H. Toyota, S. Nomura, T. Takemori, S. Mukasa, T. Maehara, and H. Yamashita: J. Appl. Phys. 101 (2007) 093303.
11. T. Kiyan, A. Uemura, B.C. Roy, T. Namihira, M. Hara, M. Sasaki, M. Goto, and H. Akiyama: IEEE Trans. Plasma Sci. 35 (2007) 656.
12. Y. Suga, M. Sone, K. Totani, and T. Watanabe: Proc. 3rd Int. Workshop Microplasmas, 2006, p. 61.
13. T. Ito, K. Katahira, Y. Shimizu, T. Sasaki, N. Koshizaki, and K. Terashima: J. Mater. Chem. 14 (2004) 1513.
14. T. Tomai, K. Katahira, H. Kubo, Y. Shimizu, T. Sasaki, N. Koshizaki, and K. Terashima: J. Supercrit. Fluids 41 (2007) 404.
15. H. Kikuchi, H. Kubo, T. Tomai, and K. Terashima: Thin Solid Films 516 (2008) 6677.
16. T. Maehara, A. Kawashima, A. Iwamae, S. Mukasa, T. Takemori, T. Watanabe, K. Kurokawa, H. Toyota, and S. Nomura: Phys. Plasmas 16 (2009) 033503.
17. R.W.B. Pearse and A.G. Gaydon: The Identification of Molecular Spectra (Chapman and Hall, London, 1963) 4th ed., p. 83.
18. T.G. McCauley, D.M. Gruen, and A.R. Krauss: Appl. Phys. Lett. 73 (1998) 1646.
19. Y. Suga and T. Watanabe: to be published in Trans. Mater. Res. Soc. Jpn.
20. S. Aisenberg and R. Chabot: J. Appl. Phys. 42 (1971) 2953.
21. Y. Nishimura, A. Chayahara, Y. Horino, and M. Yatsuzuka: Surf. Coat. Technol. 156 (2002) 50.