Cu films deposition by dielectric barrier discharge in supercritical CO2, Ar and Xe environments

Thin Solid Films

Volumn 516, Issue 19, 2008, Pages 6677-6682

  Kikuchi, Hirokazu ^a   Kubo, Hirotake ^a   Tomai, Takaaki ^a   Terashima, Kazuo ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Chemical fluid deposition; Cu film; Dielectric barrier discharge; Microplasma; Supercritical Ar; Supercritical CO2; Supercritical fluid; Supercritical Xe

Indexed keywords

COBALT; COBALT ALLOYS; COBALT COMPOUNDS; COPPER ALLOYS; METALLIC FILMS; PLASMAS;

CU(TI) FILM; DIELECTRIC BARRIER DISCHARGE (DBD); HIGH RATE DEPOSITION; SUPER-CRITICAL;

COPPER;

EID: 45549109761     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.11.042     Document Type: Article

References (20)

1. Holmes J.D., Lyons D.M., and Ziegler K.J. Chem. Eur. J. 9 (2003) 2144
2. Poliakoff M., and Anastas P. Nature 413 (2001) 257
3. Cooper A.I. Adv. Mater. 13 (2001) 1111
4. Blackburn J.M., Long D.P., Cabaňas A., and Watkins J.J. Science 294 (2001) 141
5. Zong Y., and Watkins J.J. Chem. Mater. 17 (2005) 560
6. Cabaňas A., Blackburn J.M., and Watkins J.J. Microelectron. Eng. 64 (2002) 53
7. Ito T., and Terashima K. Appl. Phys. Lett. 80 (2002) 2854
8. Ito T., Fujiwara H., and Terashima K. J. Appl. Phys. 94 (2003) 5411
9. Sawada M., Tomai T., Ito T., Fujiwara H., and Terashima K. J. Appl. Phys. 100 (2006) 123304
10. Lock E., Saveliev A., and Kennedy L. IEEE Trans. Plasma Sci. 33 (2005) 850
11. Zhang C.H., Kiyan T., Namihara T., Uemura A., Akiyama H., Fang T., Sasaki M., and Goto M. Proceedings of Industry Application Society, 40th Annual General Meeting, Hong Kong, China (October 2-6, 2005) 1845
12. Kawashima A., Toyota H., Nomura S., Takemori T., Mukasa S., Maehara T., and Yamashita H. J. Appl. Phys. 101 (2007) 093303
13. Ito T., Katahira K., Shimizu Y., Sasaki T., Koshizaki N., and Terashima K. J. Mater. Chem. 14 (2004) 1513
14. Tomai T., Ito T., and Terashima K. Thin Solid Films 506-507 (2006) 409
15. Tomai T., Katahira K., Kubo H., Shimizu Y., Sasaki T., Koshizaki N., and Terashima K. J. Supercrit. Fluids 41 (2007) 404
16. Kikuchi H., Kubo H., Tomai T., and Terashima K. Proceedings of 8th International Symposium on Supercritical Fluids, Kyoto, Japan (November 5--8, 2006) PB-2-41
17. Tomai T., and Terashima K. Proceedings of 8th International Symposium on Supercritical Fluids, Kyoto, Japan (November 5--8, 2006) OB-3-07
18. Kondoh E. Jpn. J. Appl. Phys. 43 (2004) 3928
19. Wagner H.-E., Brandenburg R., Kozlov K.V., Sonnenfeld A., Michel P., and Behnke J.F. Vacuum 71 (2003) 417
20. Chen Y.D., Reisman A., Turik I., and Temple D. J. Electrochem. Soc. 142 (1995) 3903