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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 28, Issue 5, 2010, Pages 1157-1160

Identification of B-K near edge x-ray absorption fine structure peaks of boron nitride thin films prepared by sputtering deposition

(4) Niibe, Masahito a Miyamoto, Kazuyoshi a,b Mitamura, Tohru a Mochiji, Kozo b

a UNIVERSITY OF HYOGO (Japan)

b Graduate School of Engineering (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BN FILMS; BORON ATOM; BORON NITRIDE THIN FILMS; CLUSTER MODELS; FIRST-PRINCIPLES CALCULATION; NEAR EDGE X-RAY ABSORPTION FINE STRUCTURES; NITROGEN ATOM; NITROGEN VACANCIES; OXYGEN ATOM; PHOTON ENERGY; RESONANCE PEAK; SIMULTANEOUS MEASUREMENT; SPUTTERING DEPOSITION; STRONG CORRELATION;

ABSORPTION; ATOMS; BORON; DEPOSITION; FILM PREPARATION; NITRIDES; NITROGEN; OXYGEN; THIN FILMS; X RAY ABSORPTION;

BORON NITRIDE;

EID: 77956411147 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3474913 Document Type: Article

Times cited : (17)

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