SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 28, Issue 5, 2010, Pages 1279-1280

Cosputtered composition-spread reproducibility established by high-throughput x-ray fluorescence

(5) Gregoire, John M a Dale, Darren b Kazimirov, Alexander b Disalvo, Francis J b Bruce Van Dover, R a

a School of Operations Research and Industrial Engineering (United States)

b NONE (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC PERCENT; AUTOMATED ANALYSIS; COMPOSITION MEASUREMENTS; COMPOSITION REPRODUCIBILITY; COMPOSITION-SPREAD THIN FILMS; CORNELL HIGH-ENERGY SYNCHROTRON SOURCES; HIGH THROUGHPUT EXPERIMENTS; HIGH-THROUGHPUT; REPRODUCIBILITIES; X RAY FLUORESCENCE;

FLUORESCENCE;

ZIRCONIA;

EID: 77956404839 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3478668 Document Type: Article

Times cited : (5)

References (8)

1
- 51349093469
- 10.1179/174328408X293612
- Z. H. Barber and M. G. Blamire, Mat. Sci. Tech. 24, 757 (2008). 10.1179/174328408X293612
- (2008) Mat. Sci. Tech. , vol.24 , pp. 757
- Barber, Z.H.¹ Blamire, M.G.²

2
- 0345759562
- ASUSEE 0169-4332,. 10.1016/S0169-4332(03)00895-X
- S. Vogt, Y. Chu, A. Tkachuk, P. Ilinski, D. Walko, and F. Tsui, Appl. Surf. Sci. ASUSEE 0169-4332 223, 214 (2004). 10.1016/S0169-4332(03)00895-X
- (2004) Appl. Surf. Sci. , vol.223 , pp. 214
- Vogt, S.¹ Chu, Y.² Tkachuk, A.³ Ilinski, P.⁴ Walko, D.⁵ Tsui, F.⁶

3
- 34547693392
- Use of a synchrotron X-ray microbeam to map composition and structure of multimetallic metal oxide films deposited by combinatorial chemical vapor deposition
- DOI 10.1016/j.surfcoat.2007.05.026, PII S0257897207005476
- B. Xia, Y. S. Chu, and W. L. Gladfelter, Surf. Coat. Technol. SCTEEJ 0257-8972 201, 9041 (2007). 10.1016/j.surfcoat.2007.05.026 (Pubitemid 47209448)
- (2007) Surface and Coatings Technology , vol.201 , Issue.22-23 SPEC. ISS. , pp. 9041-9045
- Xia, B.¹ Chu, Y.S.² Gladfelter, W.L.³

4
- 73849128778
- RSINAK 0034-6748,. 10.1063/1.3274179
- J. M. Gregoire, D. Dale, A. Kazimirov, F. J. DiSalvo, and R. B. van Dover, Rev. Sci. Instrum. RSINAK 0034-6748 80, 123905 (2009). 10.1063/1.3274179
- (2009) Rev. Sci. Instrum. , vol.80 , pp. 123905
- Gregoire, J.M.¹ Dale, D.² Kazimirov, A.³ Disalvo, F.J.⁴ Van Dover, R.B.⁵

5
- 0442326026
- MRCOE3 1022-1336,. 10.1002/marc.200300213
- R. B. van Dover and L. F. Schneemeyer, Macromol. Rapid Commun. MRCOE3 1022-1336 25, 150 (2004). 10.1002/marc.200300213
- (2004) Macromol. Rapid Commun. , vol.25 , pp. 150
- Van Dover, R.B.¹ Schneemeyer, L.F.²

6
- 33847221102
- SPACA5 0038-6987.
- V. Soĺ, E. Papillon, M. Cotte, P. Walter, and J. Susini, Spectrochim. Acta SPACA5 0038-6987 B62, 63 (2007).
- (2007) Spectrochim. Acta , vol.62 , pp. 63
- Soĺ, V.¹ Papillon, E.² Cotte, M.³ Walter, P.⁴ Susini, J.⁵

7
- 77956406250
- JCPDS Card Nos. 4-010-3273 and 30-1468
- JCPDS Card Nos. 4-010-3273 and 30-1468.

8
- 73849128778
- RSINAK 0034-6748,. 10.1063/1.3274179
- J. M. Gregoire, D. Dale, A. Kazimirov, F. J. DiSalvo, and R. B. van Dover, Rev. Sci. Instrum. RSINAK 0034-6748 80, 123905 (2009). 10.1063/1.3274179
- (2009) Rev. Sci. Instrum. , vol.80 , pp. 123905
- Gregoire, J.M.¹ Dale, D.² Kazimirov, A.³ Disalvo, F.J.⁴ Van Dover, R.B.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.