Development research of science and technologies in ultra-precision machining field

Jixie Gongcheng Xuebao/Journal of Mechanical Engineering

Volumn 46, Issue 15, 2010, Pages 161-177

  Yuan, Julong ^a   Zhang, Feihu ^b   Dai, Yifan ^c   Kang, Renke ^d   Yang, Hui ^e   Lü, Binghai ^a  

^a HUNAN UNIVERSITY   (China)

^b HARBIN INSTITUTE OF TECHNOLOGY   (China)

^c NATIONAL UNIVERSITY OF DEFENSE TECHNOLOGY   (China)

^d DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^e China Precision Engineering Institute for Aircraft Industry   (China)

Author keywords

Development tendency; Present research status; Ultra precision machining

Indexed keywords

ADVANCED TECHNOLOGY; APPLICATION FIELDS; COMPLICATED SYSTEMS; DEVELOPMENT TENDENCY; FORM ACCURACY; FUNDAMENTAL RESEARCH; KEY ISSUES; MACHINING ACCURACY; MISS DISTANCE; PRESENT RESEARCH STATUS; SCIENCE AND TECHNOLOGY; SURFACE FINISHES; SURFACE INTEGRITY; ULTRA-PRECISION CUTTING; ULTRA-PRECISION MACHINE TOOLS; ULTRAPRECISION MACHINING;

CUTTING TOOLS; FINISHING; GRINDING (MACHINING); MACHINE TOOLS; RESEARCH;

PRECISION ENGINEERING;

EID: 77956318815     PISSN: 05776686     EISSN: None     Source Type: Journal    
DOI: 10.3901/JME.2010.15.161     Document Type: Review

References (19)

1. YUAN Julong. Ultraprecision machining of functional ceramics[M]. Harbin: Press of Harbin Institute of Technology, 2000.
2. YUAN Zhejun, WANG Xiankui. The technology of precision machining and ultra-precision machining[M]. 2nd ed. Beijing: China Machine Press, 2007.
3. Editing committee of Microfabrication Technology. Microfabrication technology[M]. Beijing: Science Press, 1983.
4. IKAWA Naoya, SHIMADA Shoichi. Accuracy problems in ultra-precision metal cutting[J]. Journal of the Japan Society of Precision Engineering, 1986, 52(12): 2000-2004.
5. SHIMADA S. Feasibility study on ultimate accuracy in micro-cutting using molecular dynamics simulations[J]. Annals of the CIRP, 1993, 42(1): 91-94.
6. WECK M, KLOCKE F. Manufacturing and applications of non-rotationally symmetric optics[J]. SPIE, 1999, 3739: 94-107.
7. GAO W. Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder[J]. Precision Engineering, 2003, 27: 289-298.
8. OHMORI H, NAKAGAWA T. Mirror surface grinding of silicon wafers with electrolytic in-process dressing[J]. Ann. CIRP, 1990, 39(1): 329-332.
9. ZHOU Libo, JUN S, HIROSHI E. A novel fixed abrasive process: Chemo-mechanical grinding technology[J]. International Journal of Manufacturing Technology and Management, 2005, 7(6-7): 441-454.
10. KASAI Toshio, DOY Toshiro. Grinding, lapping and polishing technologies under nanometer scale working conditions[J]. Journal of the Japan Society of Precision Engineering, 1993, 59(4): 559-562.
11. YASUNAGA N, OBARA A, TARUMI N. Study of mechanochemical effect on wear and its application to surface finishing[J]. Res. Electrotech. Lab., 1977, 776: 50-134.
12. KORDONSKY W I, WILLIAM I, PROKHOROV I V. Magnetorheological polishing devices and methods: US, 5449313[P]. 1994-04-15.
13. WALKER D, BROOKS D, KING A, et al. The precessions' tooling for polishing and figuring flat, spherical and aspheric surfaces[J]. Opt. Express, 2003, 11(8): 958-964.
14. WANG J. Abrasive waterjet machining of engineering materials[M]. Switzerland: Trans. Tech. Publications Ltd., 2003.
15. MARTIN H M, ALLEN R G, BURGE J H. F Fabrication of mirrors for the Magellan telescopes and large binocular telescope[J]. Proceeding of SPIE, 2003, 4837: 1-10.
16. SHUN Xiwei, ZHANG Feihu, DONG Shen, et al. Research on remove model and algorithm of resident time for magnetorheological finishing[J]. New Technology & New Process, 2006(2): 73-75.
17. DAI Yifan, ZHOU Lin, XIE Xuhui. Deterministic figuring in optical machining by ion beam[J]. Acta Optica Sinica, 2008, 28(6): 1131-1135.
18. YUAN Julong, WANG Zhiwei, WEN Donghui, et al. Review on ultra-precision machining technology[J]. Chinese Journal of Mechanical Engineering, 2007, 43(1): 35-48.
19. Society and Technology Association of China, Chinese Mechanical Engineering Society. Report on advances in mechanical engineering between 2008 and 2009[M]. Beijing: China Society and Technology Press, 2009.