Fabrication of thermoelectric devices by applying microsystems technology

Journal of Electronic Materials

Volumn 39, Issue 9, 2010, Pages 1516-1521

  Goncalves, L M ^a   Alpuim, P ^a   Correia, J H ^a  

^a UNIVERSITY OF MINHO   (Portugal)

Author keywords

Bismuth telluride; energy harvesting; microcooler; thermoelectric

Indexed keywords

ANTIMONY TELLURIDE; BISMUTH TELLURIDE; BULK MATERIALS; CO-EVAPORATIONS; DEPOSITION METHODS; ETCH RATES; ETCHING PROCESS; FABRICATION PROCESS; FIGURE OF MERIT; FIGURES OF MERITS; MICRO SYSTEMS TECHNOLOGIES; MICROCONVERTERS; MICROCOOLERS; MICROELECTROMECHANICAL SYSTEMS; SU-8 PHOTORESIST; TECHNIQUES USED; TEST STRUCTURE; THERMOELECTRIC; THERMOELECTRIC DEVICES;

ANTIMONY; ANTIMONY COMPOUNDS; BISMUTH; BISMUTH COMPOUNDS; ENERGY HARVESTING; FABRICATION; FILMS; HARVESTING; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; PHOTORESISTS; REACTIVE ION ETCHING; REACTIVE MOLDING; TELLURIUM COMPOUNDS;

WET ETCHING;

EID: 77956230792     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-010-1287-0     Document Type: Article

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