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Volumn 39, Issue 9, 2010, Pages 2013-2016
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Fabrication and characterization of nanopillars for silicon-based thermoelectrics
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Author keywords
Nanopillars; silicon; thermoelectrics
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Indexed keywords
LATERAL STRUCTURING;
NANOMANIPULATORS;
NANOPILLARS;
PIEZO-RESISTIVE;
SCANNING ELECTRON MICROSCOPES;
SI-BASED;
SILICON CANTILEVER;
SILICON-BASED;
STRUCTURAL CHARACTERIZATION;
THERMAL OXIDATION;
THERMOELECTRICS;
TUNGSTEN PROBES;
FABRICATION;
PROBES;
SCANNING ELECTRON MICROSCOPY;
TUNGSTEN;
ASPECT RATIO;
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EID: 77956229421
PISSN: 03615235
EISSN: None
Source Type: Journal
DOI: 10.1007/s11664-009-1015-9 Document Type: Article |
Times cited : (7)
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References (7)
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