|
|
Volumn 518, Issue 23, 2010, Pages 6752-6755
|
|
Preparation of zinc tin oxide films by reactive magnetron sputtering of Zn on liquid Sn
a
|
|
Author keywords
Conductive oxides; Reactive sputtering; Zinc oxide; Zinc tin oxide
|
|
Indexed keywords
BLUE SHIFT;
CONDUCTIVE OXIDES;
CUTOFF WAVELENGTHS;
ELECTRICAL CHARACTERIZATION;
EX SITU;
OPTICAL TRANSPARENCY;
POLYCRYSTALLINE ZNO;
RADIO-FREQUENCY-MAGNETRON SPUTTERING;
REACTIVE MAGNETRON SPUTTERING;
RUTHERFORD BACK-SCATTERING;
THERMAL TREATMENT;
VISIBLE RANGE;
ZINC TIN OXIDE;
ZNO;
ZNO LAYERS;
ANNEALING;
DIFFRACTION;
FILM PREPARATION;
HOLOGRAPHIC INTERFEROMETRY;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
TIN;
TIN OXIDES;
TITANIUM COMPOUNDS;
TRANSPARENCY;
X RAY DIFFRACTION;
ZINC;
ZINC OXIDE;
OXIDE FILMS;
|
|
EID: 77956227619
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2010.06.006 Document Type: Article |
|
Times cited : (9)
|
|
References (13)
|
