Design of laser micromachined single crystal 6H-SiC diaphragms for high-temperature micro-electro-mechanical-system pressure sensors

Materials and Design

Volumn 32, Issue 1, 2011, Pages 127-132

  Gupta, Saurabh ^a   Molian, Pal ^a  

^a Iowa State University   (United States)

Author keywords

A. Semi conductors; C. Lasers; E. Mechanical

Indexed keywords

C. LASERS; E. MECHANICAL; FINITE ELEMENT MODELS; HIGH TEMPERATURE; MICROELECTROMECHANICAL SYSTEMS; MICROMACHINED; MICROMACHINES; MODEL DATA; PULSED EXCIMER LASERS; SEMI CONDUCTOR;

DIAPHRAGMS; ELASTICITY; EXCIMER LASERS; FINITE ELEMENT METHOD; GAS LASERS; PRESSURE SENSORS; PULSED LASER APPLICATIONS; PULSED LASERS; SEMICONDUCTING SILICON COMPOUNDS; SILICON CARBIDE; SINGLE CRYSTALS; STRUCTURAL DESIGN;

STRESSES;

EID: 77956174623     PISSN: 02641275     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matdes.2010.06.024     Document Type: Article

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