Combined effect of the membrane flatness defect and real dimensions gauges on the sensitivity of a silicon piezoresistive pressure sensor

Proceedings of IEEE Sensors

Volumn 1, Issue 2, 2002, Pages 990-993

  Dibi, Z ^a   Boukabache, A ^b   Pons, P ^b  

^a UNIVERSITY OF BATNA   (Algeria)

^b LAAS CNRS   (France)

Author keywords

Flatness; Gauge; Membrane; Piezoresistivity; Pressure sensor; Sensitivity

Indexed keywords

MEMBRANES; MICROELECTRONICS; PIEZOELECTRICITY; PRESSURE GAGES; PRESSURE MEASUREMENT; THICKNESS MEASUREMENT;

MEMBRANE FLATNESS; PIEZORESISTIVITY; PRESSURE SENSORS;

SILICON SENSORS;

EID: 1542301538     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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