Properties of lithium phosphorus oxynitride (Lipon) for 3D solid-state lithium batteries

Journal of Materials Research

Volumn 25, Issue 8, 2010, Pages 1507-1515

  Xu, Fan ^a   Dudney, Nancy J ^a   Veith, Gabriel M ^a   Kim, Yoongu ^a   Erdonmez, Can ^b   Lai, Wei ^b   Chiang, Yet Ming ^b  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

^b Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

3D STRUCTURE; DENSE FILMS; FILM DEPOSITION; LINE-OF-SIGHT; LIPON ELECTROLYTES; OFF-AXIS; OXYNITRIDES; PLANAR SUBSTRATE; SOLID-STATE LITHIUM BATTERIES; THIN FILM BATTERY; THIN FILM ELECTROLYTES;

ELECTROLYTES; NITRIDES; PHOSPHORUS; THIN FILMS; THREE DIMENSIONAL;

LITHIUM;

EID: 77955967297     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2010.0193     Document Type: Article

References (29)

1. J.B. Bates, N.J. Dudney, G.R. Gruzalski, R.A. Zuhr, A. Choudhury, C.F. Luck, and J.D. Robertson: Electrical properties of amorphous lithium electrolyte thin films. Solid State Ionics 53-56(Pt. 1), 647 (1992).
2. J.B. Bates, N.J. Dudney, G.R. Gruzalski, R.A. Zuhr, A. Choudhury, C.F. Luck, and J.D. Robertson: Fabrication and characterization of amorphous lithium electrolyte thin films and rechargeable thin-film batteries. J. Power Sources 43(1-3), 103 (1993).
3. J.B. Bates, N.J. Dudney, D.C. Lubben, G.R. Gruzalski, B.S. Kwak, X. Yu, and R.A. Zuhr: Thin-film rechargeable lithium batteries. J. Power Sources 54(1), 58 (1995).
4. X. Yu, J.B. Bates, G.E. Jellison, Jr., and F.X. Hart: A stable thin-film lithium electrolyte: Lithium phosphorus oxynitride. J. Electrochem. Soc. 144(2), 524 (1997).
5. B.J. Neudecker, N.J. Dudney, and J.B. Bates: "Lithium-free" thin-film battery with in situ plated Li anode. J. Electrochem. Soc. 147(2), 517 (2000).
6. N.J. Dudney: Solid-state thin-film rechargeable batteries. Mater. Sci. Eng., B 116, 245 (2005).
7. Y. Hamon, A. Douard, F. Sabary, C. Marcel, P. Vinatier, B. Pecquenard, and A. Levasseur: Influence of sputtering conditions on ionic conductivity of LiPON thin films. Solid State Ionics 177(3-4), 257 (2006).
8. N.S. Roh, S.D. Lee, and H.S. Kwon: Effects of deposition condition on the ionic conductivity and structure of amorphous lithium phosphorus oxynitrate thin film. Scr. Mater. 42(1), 43 (1999).
9. Z. Hu, D. Li, and K. Xie: Influence of radio frequency power on structure and ionic conductivity of LiPON thin films. Bull. Mater. Sci. 31(4), 681(2008).
10. F. Vereda, N. Clay, A. Gerouki, R.B. Goldner, T. Haas, and P. Zerigian: A study of electronic shorting in IBDA-deposited Lipon films. J. Power Sources 89(2), 201 (2000).
11. Y.G. Kim and H.N.G. Wadley: Lithium phosphorous oxynitride films synthesized by a plasma-assisted directed vapor deposition approach. J. Vac. Sci. Technol., A 26(1), 174 (2008).
12. S. Zhao, Z. Fu, and Q. Qin: A solid-state electrolyte lithium phosphorus oxynitride film prepared by pulsed laser deposition. Thin Solid Films 415, 108 (2002).
13. J.W. Long, B. Dunn, D.R. Rolison, and H.S. White: Three-dimensional battery architectures. Chem. Rev. 104, 4463 (2004).
14. P.H.L. Notten, F. Roozeboom, R.A.H. Niessen, and L. Baggetto: 3-D integrated all-solid-state rechargeable batteries. Adv. Mater. 19(24), 4564 (2007).
15. N.S. Ergang, M.A. Fierke, Z. Wang, W.H. Smyrl, and A. Stein: Fabrication of a fully infiltrated three-dimensional solid-state interpenetrating electrochemical cell. J. Electrochem. Soc. 154(12), A1135 (2007).
16. D. Golodnitsky, V. Yufit, M. Nathan, I. Shechtman, T. Ripenbein, E. Strauss, S. Menkin, and E. Peled: Advanced materials for the 3D microbattery. J. Power Sources 153(2), 281 (2006).
17. W. Lai, C.K. Erdonmez, T.F. Marinis, C.K. Bjune, N.J. Dudney, F. Xu, R. Wartena, and Y-M. Chiang: Ultrahigh energy density microbatteries enabled by new electrode architecture and micropackaging design. Adv. Mater. 22, E1 (2010).
18. B. Dunn: Personal communication.
19. W.D. West wood: Calculation of deposition rates in diode sputtering systems. J. Vac. Sci. Technol. 15, 1 (1978).
20. M. Ohring: The Materials Science of Thin Films (Academic Press, San Diego, CA, 2002), pp. 87, 96.
21. T. Motohiro: Applications of Monte Carlo simulation in the analysis of a sputter-deposition process. J. Vac. Sci. Technol., A 4, 189 (1986).
22. T. Nakano and S. Baba: Gas pressure effects on thickness uniformity and circumvented deposition during sputter deposition process. Vacuum 80, 647 (2006).
23. Y. Kim and N.J. Dudney: Unpublished work.
24. Y.G. Yang, R.A. Johnson, and H.N.G. Wadley: A Monte Carlo simulation of the physical vapor deposition of nickel. Acta Mater. 45, 1455 (1997).
25. J.D. Robertson, J.B. Bates, N.J. Dudney, and R.A. Zuhr: Ion beam analysis of lithium-ion conducting amorphous electrolyte films. Nucl. Instrum. Methods Phys. Res., Sect. B 56, 722 (1991).
26. B. Wang, B.S. Kwak, B.C. Sales, and J.B. Bates: Ionic conductivities and structure of lithium phosphorus oxynitride glasses. J. Non-Cryst. Solids 183, 297 (1995).
27. ySiTON): High-performance anode in thin-film lithium-ion batteries for microelectronics. J. Power Sources 81, 27 (1999).
28. N.J. Dudney: Thin film micro-batteries. Electrochem. Soc. Interface 17(3), 44 (2008).
29. 2 fibers. Electrochem. Solid-State Lett. 11(8), A140 (2008).