Growth kinetics of AlxGa1-xN layers (0 (4) Mizerov, A M a Jmerik, V N a Kop'ev, P S a Ivanov, S V a a IOFFE INSTITUTE (Russian Federation)

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 7, Issue 7-8, 2010, Pages 2046-2048

Author keywords

Adsorption desorption kinetics; AlGaN; Layer growth; MBE; Structure

Indexed keywords

ADSORPTION/DESORPTION KINETICS; ALGAN; LAYER GROWTH; MBE; STRUCTURE;

ALUMINUM; BUFFER LAYERS; EPITAXIAL GROWTH; GALLIUM ALLOYS; MOLECULAR BEAM EPITAXY; MOLECULAR BEAMS; NITRIDES; NITROGEN PLASMA; SEMICONDUCTOR GROWTH; SUBSTRATES;

GROWTH KINETICS;

EID: 77955780837     PISSN: 18626351     EISSN: 16101642     Source Type: Journal    
DOI: 10.1002/pssc.200983488     Document Type: Conference Paper

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