Strength distribution of single-crystal silicon theta-like specimens

Scripta Materialia

Volumn 63, Issue 4, 2010, Pages 422-425

  Gaither, Michael S ^a   Delrio, Frank W ^a   Gates, Richard S ^a   Fuller Jr , Edwin R ^a   Cook, Robert F ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Finite element methods; Fracture strength; Microelectromechanical systems; Single crystal silicon

Indexed keywords

DEEP REACTIVE ION ETCHING; DIRECT ASSESSMENT; FINITE ELEMENT ANALYSIS; FRACTURE STRENGTH; FRACTURE STRENGTHS; INSTRUMENTED INDENTATION; MICRO-SCALES; MICROELECTROMECHANICAL SYSTEMS; SINGLE CRYSTAL SILICON; STRENGTH DISTRIBUTION; SURFACE EFFECT; TEST RESULTS; TEST SPECIMENS;

COMPOSITE MICROMECHANICS; FINITE ELEMENT METHOD; FRACTURE; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; REACTIVE ION ETCHING;

TENSILE STRENGTH;

EID: 77955665713     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2010.04.047     Document Type: Article

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