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Volumn 26, Issue 2, 2005, Pages 117-126

A novel test method for measuring mechanical properties at the small-scale: The theta specimen

Author keywords

[No Author keywords available]

Indexed keywords

COMPACTION; FRACTURE; MATERIALS; NANOSTRUCTURED MATERIALS; REACTIVE ION ETCHING; STRESSES;

EID: 32044466064     PISSN: 01966219     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1002/9780470291221.ch15     Document Type: Conference Paper
Times cited : (16)

References (20)
  • 1
    • 0344493835 scopus 로고    scopus 로고
    • An introduction to mechanical-properties-related issues in MEMS structures
    • S. M. Allameh, "An Introduction to Mechanical-Properties-Related Issues in MEMS Structures," J. Mat. Sci., 38, 4115-23 (2003).
    • (2003) J. Mat. Sci. , vol.38 , pp. 4115-4123
    • Allameh, S.M.1
  • 2
    • 0345015823 scopus 로고    scopus 로고
    • Probabilistic weibull behavior and mechanical properties of MEMS brittle materials
    • O. M. Jadaan, N. N. Nemeth, J. Bagdahn, and W. N. Sharpe, Jr., "Probabilistic Weibull Behavior and Mechanical Properties of MEMS Brittle Materials," J. Mat. Sci., 38, 4087-113 (2003).
    • (2003) J. Mat. Sci. , vol.38 , pp. 4087-4113
    • Jadaan, O.M.1    Nemeth, N.N.2    Bagdahn, J.3    Sharpe Jr., W.N.4
  • 4
    • 0030720580 scopus 로고    scopus 로고
    • Mechanical properties of LIGA-deposited nickel for MEMS transducers
    • Chicago, IL
    • W.N. Sharpe, Jr., D.A. LaVan, and R.L. Edwards, "Mechanical Properties of LIGA-Deposited Nickel for MEMS Transducers," in Proc. Transducers '97, Chicago, IL, 607-10 (1997).
    • (1997) Proc. Transducers '97 , pp. 607-610
    • Sharpe Jr., W.N.1    LaVan, D.A.2    Edwards, R.L.3
  • 7
    • 0036506588 scopus 로고    scopus 로고
    • Subcritical crack growth in single crystal silicon using micromachined specimens
    • A. M. Fitzgerald, R. S. Iyer, R. H. Dauskardt, and T. W. Kenny, "Subcritical Crack Growth in Single Crystal Silicon Using Micromachined Specimens, J. Mater. Res., 17 [3] 683-91 (2002).
    • (2002) J. Mater. Res. , vol.17 , Issue.3 , pp. 683-691
    • Fitzgerald, A.M.1    Iyer, R.S.2    Dauskardt, R.H.3    Kenny, T.W.4
  • 8
    • 32044471504 scopus 로고
    • The theta specimen for determining tensile strength of brittle materials
    • A. J. Durelli, S. Morse, and V. Parks, "The Theta Specimen for Determining Tensile Strength of Brittle Materials," Mat. Res. and Stand., 2, 114-7 (1962).
    • (1962) Mat. Res. and Stand. , vol.2 , pp. 114-117
    • Durelli, A.J.1    Morse, S.2    Parks, V.3
  • 9
    • 32044440502 scopus 로고
    • Influence of size and shape on the tensile strength of brittle materials
    • A. J. Durelli and V. J. Parks, "Influence of Size and Shape on the Tensile Strength of Brittle Materials," Brit. J. Appl. Phys, 18, 387-8 (1967).
    • (1967) Brit. J. Appl. Phys , vol.18 , pp. 387-388
    • Durelli, A.J.1    Parks, V.J.2
  • 13
    • 32044452404 scopus 로고
    • Studies of the brittle behavior of ceramic materials
    • April, prepared by the Illinois Institute of Technology, Chicago, IL, for the Air Force Directorate, Wright Patterson Air Force Base, OH
    • N. A. Weil, "Studies of the Brittle Behavior of Ceramic Materials," Technical Report ASD-TR-61-628, April 1962, prepared by the Illinois Institute of Technology, Chicago, IL, for the Air Force Directorate, Wright Patterson Air Force Base, OH, pp. 139-169.
    • (1962) Technical Report ASD-TR-61-628 , pp. 139-169
    • Weil, N.A.1
  • 14
    • 0039026541 scopus 로고
    • Strength testing of Ceramics - A survey
    • ed. J. Wachtman, Jr., National Bureau of Standards Special Publication 303, May
    • L. Mordfin and M. J. Kerper, "Strength Testing of Ceramics-A Survey," pp. 243-261 in Mechanical and Thermal Properties of Ceramics, ed. J. Wachtman, Jr., National Bureau of Standards Special Publication 303, May 1969.
    • (1969) Mechanical and Thermal Properties of Ceramics , pp. 243-261
    • Mordfin, L.1    Kerper, M.J.2
  • 15
    • 0026873781 scopus 로고
    • Diagnostic microstructures for the measurement of intrinsic strain in thin films
    • H. Guckel, D. Burns, C. Rutigliano, E. Lovell, and B. Choi, "Diagnostic Microstructures for the Measurement of Intrinsic Strain in Thin Films," J. Micromech. Microeng, 2, 86-95 (1992).
    • (1992) J. Micromech. Microeng , vol.2 , pp. 86-95
    • Guckel, H.1    Burns, D.2    Rutigliano, C.3    Lovell, E.4    Choi, B.5
  • 16
    • 33744657184 scopus 로고
    • Measurement of third order moduli of silicon and germanium
    • H. J. McSkimin and P. Andreatch Jr., "Measurement of Third Order Moduli of Silicon and Germanium, J. Appl. Phys., 35 [11] 3312-19 (1964).
    • (1964) J. Appl. Phys. , vol.35 , Issue.11 , pp. 3312-3319
    • McSkimin, H.J.1    Andreatch Jr., P.2
  • 18


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