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Volumn 518, Issue 21, 2010, Pages 6040-6047

Evaluation on plastic deformation property of copper nano-film by nano-scale cantilever specimen

Author keywords

Constitutive equation; Copper; Deformation; Finite element method; Inverse analysis; Thin films

Indexed keywords

BENDING EXPERIMENTS; BOTTOM SURFACES; CU FILMS; CU THIN FILM; ELASTOPLASTIC DEFORMATION; HARDENING LAWS; INVERSE ANALYSIS; MULTI-LAYER THIN FILM; NANO SCALE; NON-LINEARITY; SILICON SUBSTRATES;

EID: 77955549793     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2010.06.039     Document Type: Article
Times cited : (35)

References (16)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.