메뉴 건너뛰기




Volumn 9, Issue 4, 2009, Pages 2498-2510

A Small-Displacement Sensor Using Total Internal Reflection Theory and Surface Plasmon Resonance Technology for Heterodyne Interferometry

Author keywords

Heterodyne interferometry (HI); Small displacement sensor; Surface plasmon resonance (SPR); Total internal reflection (TIR)

Indexed keywords

HETERODYNING; INTERFEROMETRY; REFRACTIVE INDEX;

EID: 77955510239     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s90402498     Document Type: Article
Times cited : (17)

References (15)
  • 1
    • 0001158717 scopus 로고    scopus 로고
    • Quantitative amplitude and phase measurement by use of a heterodyne scanning near-field optical microscope
    • Nesci, A.; Dändliker, R.; Herzig, H.P. Quantitative amplitude and phase measurement by use of a heterodyne scanning near-field optical microscope. Opt. Lett. 2001, 26, 208-210.
    • (2001) Opt. Lett , vol.26 , pp. 208-210
    • Nesci, A.1    Dändliker, R.2    Herzig, H.P.3
  • 2
    • 0035414871 scopus 로고    scopus 로고
    • Polarization interferometer for measuring small displacement
    • Liu, X.; Clegg, W.; Jenkins, D.F.L.; Liu, B. Polarization interferometer for measuring small displacement. IEEE Trans. Instrum. Meas. 2001, 50, 868-871.
    • (2001) IEEE Trans. Instrum. Meas , vol.50 , pp. 868-871
    • Liu, X.1    Clegg, W.2    Jenkins, D.F.L.3    Liu, B.4
  • 3
    • 19844378263 scopus 로고    scopus 로고
    • A new method for measuring a small displacement by using the critical angle method and confocal technology
    • Liao, S.J.; Wang, S.F.; Chiu, M.H. A new method for measuring a small displacement by using the critical angle method and confocal technology. SPIE 2005, 5635, 211-218.
    • (2005) SPIE , vol.5635 , pp. 211-218
    • Liao, S.J.1    Wang, S.F.2    Chiu, M.H.3
  • 4
    • 36348993130 scopus 로고    scopus 로고
    • Small absolute distance measurement with nanometer resolution using geometrical optics principles and a SPR angular sensor
    • th Ed.; Pergamon Press: Oxford, UK, 1980; 45-50
    • th Ed.; Pergamon Press: Oxford, UK, 1980; pp. 45-50.
    • (2008) Sens. Act. A , vol.141 , pp. 217-223
    • Chiu, M.H.1    Shih, B.Y.2    Lai, C.W.3    Shyu, L.H.4    Wu, T.H.5
  • 5
    • 0003972070 scopus 로고
    • 6th Ed.; Pergamon Press: Oxford, UK
    • Born, M.; Wolf, E. Principles of Optics, 6th Ed.; Pergamon Press: Oxford, UK, 1980; pp. 45-50.
    • (1980) Principles of Optics , pp. 45-50
    • Born, M.1    Wolf, E.2
  • 6
    • 28044445190 scopus 로고
    • Die Bestimmung optischer Konstanten von Metallen durch Anregung von Oberflächenplasmaschwingungen
    • Kretshmann, E. Die Bestimmung optischer Konstanten von Metallen durch Anregung von Oberflächenplasmaschwingungen. Z. Phys. 1971, 241, 313-324.
    • (1971) Z. Phys , vol.241 , pp. 313-324
    • Kretshmann, E.1
  • 8
    • 33750163075 scopus 로고    scopus 로고
    • High-sensitivity small-angle sensor based on the SPR technology and heterodyne interferometry
    • Wang, S.F.; Chiu, M.H; Lai, C.W.; Chang, R.S. High-sensitivity small-angle sensor based on the SPR technology and heterodyne interferometry. Applied Optics 2006, 45, 6702-6707.
    • (2006) Applied Optics , vol.45 , pp. 6702-6707
    • Wang, S.F.1    Chiu, M.H2    Lai, C.W.3    Chang, R.S.4
  • 9
    • 7544228219 scopus 로고    scopus 로고
    • Instrument for measuring small angles by use of multiple total internal reflections in heterodyne interferometry
    • Chiu, M.H.; Wang, S.F.; Chang, R.S. Instrument for measuring small angles by use of multiple total internal reflections in heterodyne interferometry. Applied Optics 2004, 43, 5438-5442.
    • (2004) Applied Optics , vol.43 , pp. 5438-5442
    • Chiu, M.H.1    Wang, S.F.2    Chang, R.S.3
  • 10
    • 0002674964 scopus 로고
    • Investigation and compensation of the nonlinearity of heterodyne interferometers
    • Hou, W.; Wilkening, G. Investigation and compensation of the nonlinearity of heterodyne interferometers. Prec.Eng. 1992, 14, 91-98.
    • (1992) Prec.Eng , vol.14 , pp. 91-98
    • Hou, W.1    Wilkening, G.2
  • 11
    • 0027662910 scopus 로고
    • Recent advances in displacement measuring interferometry
    • Bobroff, N. Recent advances in displacement measuring interferometry. Meas. Sci. Technol. 1993, 4, 907-926.
    • (1993) Meas. Sci. Technol , vol.4 , pp. 907-926
    • Bobroff, N.1
  • 12
    • 0028196403 scopus 로고
    • Drift of nonlinearity in the heterodyne interferometer Prec
    • Hou, W.; Zhao, X. Drift of nonlinearity in the heterodyne interferometer Prec. Eng. 1994, 16, 25-35.
    • (1994) Eng , vol.16 , pp. 25-35
    • Hou, W.1    Zhao, X.2
  • 13
    • 84975582306 scopus 로고
    • Residual errors in laser interferometry fromair turbulence and nonlinearity
    • Bobroff, N. Residual errors in laser interferometry fromair turbulence and nonlinearity. Applied Optics 1987, 26, 2676-2682.
    • (1987) Applied Optics , vol.26 , pp. 2676-2682
    • Bobroff, N.1
  • 14
    • 0033740427 scopus 로고    scopus 로고
    • A frequency domain method for the measurement of nonlinearity in heterodyne interferometry
    • Badami, V.G.; Patterson, S.R. A frequency domain method for the measurement of nonlinearity in heterodyne interferometry. Prec.Eng. 2000, 24, 41-49.
    • (2000) Prec.Eng , vol.24 , pp. 41-49
    • Badami, V.G.1    Patterson, S.R.2
  • 15
    • 0027676980 scopus 로고
    • Importance of rotational beam alignment in the generation of second harmonic errors in laser heterodyne interferometry
    • Freitas, J.M.D.; Player, M.A. Importance of rotational beam alignment in the generation of second harmonic errors in laser heterodyne interferometry. Meas. Sci. Technol. 1993, 4, 1173-1176.
    • (1993) Meas. Sci. Technol , vol.4 , pp. 1173-1176
    • Freitas, J.M.D.1    Player, M.A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.