Development, fabrication, and characterization of hydrogel based piezoresistive pressure sensors with perforated diaphragms

Sensors and Actuators, A: Physical

Volumn 161, Issue 1-2, 2010, Pages 29-38

  Orthner, M P ^b   Buetefisch, Sebastian ^a   Magda, J ^b   Rieth, L W ^b   Solzbacher, F ^b  

^a Institute for Microtechnology   (Germany)

^b Department of Electrical and Computer Engineering   (United States)

Author keywords

Bulge testing; Chemical sensor; Hydrogel; Perforated diaphragm; Piezoresistive

Indexed keywords

ANALYTES; BULGE TESTING; DEEP REACTIVE ION ETCHING; DIAPHRAGM DESIGN; ELECTRICAL CHARACTERIZATION; ELECTRICAL OUTPUT; ELEVATED PRESSURE; ETCHING UNIFORMITY; EXTERNAL STIMULUS; FULL SCALE; GERMANY; HYDROGEL SWELLING; MICROPORES; NON-LINEARITY; OPTIMIZED GEOMETRIES; PASSIVATION LAYER; PIEZO-RESISTIVE; PIEZORESISTIVE PRESSURE SENSORS; PRESSURE-SENSING DIAPHRAGM; PROOF OF CONCEPT; SEMI-PERMEABLE MEMBRANES; SENSOR CAVITY; SENSOR SENSITIVITY; SILICON DIAPHRAGM; TEST RESULTS; TESTING APPARATUS;

CHEMICAL SENSORS; FABRICATION; GLUCOSE; HYDROGELS; IONIC STRENGTH; PASSIVATION; POTASSIUM HYDROXIDE; PRESSURE SENSORS; PRESSURE TRANSDUCERS; REACTIVE ION ETCHING; SENSOR ARRAYS; SILICON WAFERS;

DIAPHRAGMS;

EID: 77955432766     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.05.023     Document Type: Article

References (44)

1. A. Richter, D. Kuckling, S. Howitz, T. Gehring, and K.F. Arndt Electronically controllable microvalves based on smart hydrogels: magnitudes and potential applications Journal of Microelectromechanical Systems 12 2003 748 753
2. T. Tanaka, D. Fillmore, S.-T. Sun, I. Nishio, G. Swislow, and A. Shah Phase transitions in ionic gels Physical Review Letters 45 1980 1636
3. B.D. Johnson, D.J. Beebe, and W.C. Crone Effects of swelling on the mechanical properties of a pH-sensitive hydrogel for use in microfluidic devices Materials Science and Engineering: C 24 2004 575 581
4. S.K. De, N.R. Aluru, B. Johnson, W.C. Crone, D.J. Beebe, and J.A. Moore Equilibrium swelling and kinetics of pH-responsive hydrogels: models, experiments, and simulations Journal of Microelectromechanical Systems 11 2002 544 555
5. Q.Y. Cai, and C.A. Grimes A salt-independent pH sensor Sensors & Actuators: B. Chemical 79 2001 144 149
6. G. Gerlach, M. Guenther, G. Suchaneck, J. Sorber, K.F. Arndt, and A. Richter Application of sensitive hydrogels in chemical and pH sensors Macromolecular Symposia 210 2004 403 410
7. J. Sorber, G. Steiner, V. Schulz, M. Guenther, G. Gerlach, R. Salzer, and K.-F. Arndt Hydrogel-based piezoresistive pH sensors: investigations using FT-IR attenuated total reflection spectroscopic imaging Analytical Chemistry 80 2008 2957 2962
8. B. Zhao, and J.S. Moore Fast pH- and ionic strength-responsive hydrogels in microchannels Langmuir 17 2001 4758 4763
9. D.Y. Jung, J.J. Magda, and I.S. Han Catalase effects on glucose-sensitive hydrogels Macromolecules 33 2000 3332 3336
10. J.T. Suri, D.B. Cordes, F.E. Cappuccio, R.A. Wessling, and B. Singaram Continuous glucose sensing with a fluorescent thin-film hydrogel Angewandte Chemie 115 2003 6037 6039
11. D.T. Eddington, and D.J. Beebe Flow control with hydrogels Advanced Drug Delivery Reviews 56 2004 199 210
12. A. Guiseppi-Elie, S. Brahim, G. Slaughter, and K.R. Ward Design of a subcutaneous implantable biochip for monitoring of glucose and lactate Sensors Journal, IEEE 5 2005 345 355
13. Y.J. Zhao, A. Davidson, J. Bain, S.Q. Li, Q. Wang, Q. Lin, A MEMS viscometric glucose monitoring device, in Solid-State Sensors, Actuators and Microsystems, 2005, Digest of Technical Papers, TRANSDUCERS '05, The 13th International Conference on,A. Davidson, 2005, vol. 2, pp. 1816-1819.
14. Z. Yongjun, L. Siqi, D. Arthur, Y. Bozhi, W. Qian, and L. Qiao A MEMS viscometric sensor for continuous glucose monitoring Journal of Micromechanics and Microengineering 2007 2528
15. Y. Zhao, S. Li, A. Davidson, B. Yang, Q. Wang, and Q. Lin A MEMS viscometric sensor for continuous glucose monitoring Journal of Micromechanics and Microengineering 17 2007 2528 2537
16. J. Wang Electrochemical glucose biosensors Chemical Reviews 108 2008 814 825
17. G. Gerlach, M. Guenther, J. Sorber, G. Suchaneck, K.F. Arndt, and A. Richter Chemical and pH sensors based on the swelling behavior of hydrogels Sensors & Actuators: B. Chemical 111 2005 555 561
18. I.S. Han, M.H. Han, J. Kim, S. Lew, Y.J. Lee, F. Horkay, and J.J. Magda Constant-volume hydrogel osmometer: a new device concept for miniature biosensors Biomacromolecules 3 2002 1271 1275
19. 2 gas sensor based on sensing of pH-sensitive hydrogel swelling by means of a pressure sensor Transducers, Seoul, South Korea 2 2005 1146 1149
20. 2 detection Sensors & Actuators: B. Chemical 103 2004 284 289
21. G. Margarita, G. Gerald, K. Dirk, K. Katja, C. Cathrin, W. Jens, S. Joerg, S. Gunnar, A. Karl-Friedrich, Chemical sensors based on temperature-responsive hydrogels, I. Daniele, E. Wolfgang, C. Brian, J.P. Kara, U. Eric, 2006, vol. 6167, p. 61670T.
22. S. Herber, J. Bomer, W. Olthuis, P. Bergveld, and A.v.d. Berg A miniaturized carbon dioxide gas sensor based on sensing of pH-sensitive hydrogel swelling with a pressure sensor Biomedical Microdevices 7 2005 197 204
23. S. Herber, J. Eijkel, W. Olthuis, P. Bergveld, and A.v.d. Berg Study of chemically induced pressure generation of hydrogels under isochoric conditions using a microfabricated device The Journal of Chemical Physics 121 2004 2746 2751
24. 2 sensor Sensors & Actuators: B. Chemical 91 2003 378 382
25. M. Guenther, G. Gerlach, C. Corten, D. Kuckling, J. Sorber, and K.F. Arndt Hydrogel-based sensor for a rheochemical characterization of solutions Sensors and Actuators B: Chemical. 132 2008 471 476
26. M. Guenther, D. Kuckling, C. Corten, G. Gerlach, J. Sorber, G. Suchaneck, and K.F. Arndt Chemical sensors based on multiresponsive block copolymer hydrogels Sensors & Actuators: B. Chemical 126 2007 97 106
27. Q. Thong Trinh, G. Gerlach, J. Sorber, and K.F. Arndt Hydrogel-based piezoresistive pH sensors: design, simulation and output characteristics Sensors & Actuators: B. Chemical 117 2006 17 26
28. A. Richter, A. Bund, M. Keller, and K.-F. Arndt Characterization of a microgravimetric sensor based on pH sensitive hydrogels Sensors & Actuators: B. Chemical 99 2004 579 585
29. J. Cong, X. Zhang, K. Chen, and J. Xu Fiber optic Bragg grating sensor based on hydrogels for measuring salinity Sensors & Actuators: B. Chemical 87 2002 487 490
30. F.W. Scheller, U. Wollenberger, A. Warsinke, and F. Lisdat Research and development in biosensors Current Opinion in Biotechnology 12 2001 35 40
31. X. Huang, S. Li, J.S. Schultz, Q. Wang, and Q. Lin A dielectric affinity microbiosensor Applied Physics Letters 96 2010 033701
32. G. Lin, S. Chang, C.H. Kuo, J. Magda, and F. Solzbacher Free swelling and confined smart hydrogels for applications in chemomechanical sensors for physiological monitoring Sensors & Actuators: B. Chemical 2008 186 195
33. M. Orthner, L. Rieth, S. Buetefisch, F. Solzbacher, Novel Piezoresistive Pressure Sensor with Stress Sensitive Perforated Diaphragm for Hydrogel Applications, IEEE Sensors, Submitted for publication.
34. M. Orthner, L. Rieth, and F. Solzbacher High speed wafer scale bulge testing apparatus for the determination of thin film mechanical properties Review of Scientific Instruments 81 2010 055111
35. S.P. Timoshenko, and S. Woinowsky-Krieger Theory of Plates and Shells, Engineering Societies Monographs 2nd ed. 1959 McGraw-Hill New York
36. C. Hin-Leung, and K.D. Wise Scaling limits in batch-fabricated silicon pressure sensors IEEE Transactions on Electron Devices 34 1987 850 858
37. D. Maier-Schneider, J. Maibach, and E. Obermeier A new analytical solution for the load-deflection of square membranes Journal of Microelectromechanical Systems 4 1995 238 241
38. J.J. Vlassak, and W.D. Nix A new bulge test technique for the determination of Young's modulus and Poisson's ratio of thin films Journal of Materials Research 7 1992
39. M. Stadtmueller Mechanical stress of CVD-dielectrics Journal of the Electrochemical Society 139 1992 3669 3674
40. J.M. Olson Analysis of LPCVD process conditions for the deposition of low stress silicon nitride. Part I: Preliminary LPCVD experiments Materials Science in Semiconductor Processing 5 2002 51 60
41. E. Ventsel, and T. Krauthammer Thin Plates and Shells: Theory, Analysis, and Applications 2001 CRC Press
42. M.J. Madou Fundamentals of Microfabrication: the Science of Miniaturization 2nd ed. 2002 CRC Press Boca Raton, Fla.; London
43. K. Suzuki, T. Ishihara, M. Hirata, and H. Tanigawa Nonlinear analysis of a CMOS integrated silicon pressure sensor IEEE Transactions on Electron Devices 34 1987 1360 1367
44. S. Marco, J. Samitier, O. Ruiz, J.R. Morante, and J. Esteve High-performance piezoresistive pressure sensors for biomedical applications using very thin structured membranes Measurement Science and Technology 1996 1195