Investigation of optimized experimental parameters including laser wavelength for boron measurement in photovoltaic grade silicon using laser-induced breakdown spectroscopy

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 65, Issue 8, 2010, Pages 738-743

  Darwiche, S ^a   Benmansour, M ^b   Eliezer, N ^a   Morvan, D ^a  

^a PSL RESEARCH UNIVERSITY   (France)

^b SORBONNE UNIVERSITÉ   (France)

Author keywords

Boron; Laser induced plasma; Photovoltaic; Silicon

Indexed keywords

AMBIENT GAS; BORON CONCENTRATIONS; CALIBRATION CURVES; ELECTRON DENSITIES; EMISSION LINES; EXPERIMENTAL PARAMETERS; IMPURITIES IN; LASER INDUCED PLASMA; LASER WAVELENGTH; PHOTOVOLTAIC; PURGE GAS; SIGNAL-TO-BACKGROUND RATIO; SPECTRAL EMISSION; STARK BROADENINGS; THREE PARAMETERS; UV LASERS;

ARGON; BORON; BORON COMPOUNDS; CALIBRATION; CURVE FITTING; GASES; HELIUM; LASER PRODUCED PLASMAS; OPTIMIZATION; THERMAL PLUMES;

DENSITY OF GASES;

EID: 77955430424     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sab.2010.04.014     Document Type: Conference Paper

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