Atomic layer fluorination of highly oriented pyrolytic graphite using hyperthermal atomic fluorine beam

Applied Physics Express

Volumn 2, Issue 6, 2009, Pages

  Tagawa, Masahito ^a   Yokota, Kumiko ^a   Maeda, Ken Ichi ^a   Yoshigoe, Akitaka ^b   Teraoka, Yuden ^b  

^a KOBE UNIVERSITY   (Japan)

^b JAPAN ATOMIC ENERGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL RESULTS; ATOMIC FLUORINE; ATOMIC LAYER; C-C BONDS; CARBON BASED MATERIALS; DAMAGE-FREE; FLUORINATION REACTIONS; FLUORINE ATOMS; GRAPHITE LAYERS; HIGHLY ORIENTED PYROLYTIC GRAPHITE; HYPERTHERMAL ENERGIES; SYNCHROTRON RADIATION PHOTOELECTRON SPECTROSCOPY;

ATOMIC SPECTROSCOPY; ATOMS; ELECTRON ENERGY LOSS SPECTROSCOPY; FLUORINATION; FUNCTIONAL GROUPS; GRAPHITE; HALOGENATION; KINETIC ENERGY; PHOTOELECTRON SPECTROSCOPY; SYNCHROTRON RADIATION;

FLUORINE;

EID: 67949123288     PISSN: 18820778     EISSN: 18820786     Source Type: Journal    
DOI: 10.1143/APEX.2.066002     Document Type: Article

References (15)

1. G. E. Caledonia, R. H. Krech, and D. B. Green: AIAA J. 25 (1987) 59.
2. M. Tagawa, K. Yokota, N. Ohmae, and H. Kinoshita: J. Spacecraft Rockets 39 (2002) 447.
3. K. P. Giapis, T. A. Moore, and T. K. Minton: J. Vac. Sci. Technol. A 13 (1995) 959.
4. M. Tagawa, T. Ema, H. Kinoshita, N. Ohmae, M. Umeno, and T. K. Minton: Jpn. J. Appl. Phys. 37 (1998) L1455.
5. M. Tagawa, K. Yokota, N. Ohmae, H. Kinoshita, and M. Umeno: Jpn. J. Appl. Phys. 40 (2001) 6152.
6. M. Tagawa, K. Yokota, Y. Ohki, and N. Ohmae: J. Adhes. Sci. Technol. 18 (2004) 243.
7. Y. Saitoh, T. Nakatani, T. Matsushita, A. Agui, A. Yoshigoe, Y. Teraoka, and A. Yokoya: Nucl. Instrum. Methods Phys. Res., Sect. A 474 (2001) 253.
8. Y. Kato, K. Kanda, Y. Haruyama, and S. Matsui: Jpn. J. Appl. Phys. 45 (2006) 7978.
9. S. Tanuma, C. J. Powell, and D. R. Penn: Surf. Interface Anal. 21(1994) 165.
10. D. Marton, K. J. Boyd, T. Lytle, and J. W. Rabalais: Phys. Rev. B 48(1993) 6757.
11. G. Beamson and D. Briggs: High Resolution XPS of Organic Polymers: Scienta300 Database (Wiley, Chichester, U.K., 1992) p. 278.
12. M. Tagawa, K. Yokota, K. Maeda, A. Yoshigoe, Y. Teraoka, K. Akamatsu, and H. Nawafune: in Polyimides and Other High Temperature Polymers: Synthesis, Charactrerization and Applications, ed. K. L. Mittal (VSP, Leiden, 2009) Vol. 5, p. 249.
13. T. K. Minton and D. J. Garton: Chemical Reactions in Extreme Environments (World Scientific, Singapore, 2004) p. 420.
14. X. Chu and L. D. Schmidt: Surf. Sci. 268 (1992) 325.
15. H. Kinoshita, M. Tagawa, M. Umeno, and N. Ohmae: Surf. Sci. 440(1999) 49.