Analysis of small deflection touch mode behavior in capacitive pressure sensors

Sensors and Actuators, A: Physical

Volumn 161, Issue 1-2, 2010, Pages 114-119

  Fragiacomo, Giulio ^a   Ansbæk, Thor ^a   Pedersen, Thomas ^a   Hansen, Ole ^a   Thomsen, Erik V ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Analytical model; Capacitive sensor; Plate deflection; Touch mode

Indexed keywords

ANALYTICAL MODEL; CAPACITIVE PRESSURE SENSORS; CAPACITIVE SENSOR; EXPERIMENTAL DATA; FINITE ELEMENT MODELING; LINEAR ELASTIC BEHAVIOR; LOW-POWER CONSUMPTION; MICROMACHINED; PARASITIC CAPACITANCE; PIEZORESISTIVE PRESSURE SENSORS; SCALINGS; SMALL DEFLECTION; TOUCH MODE; TOUCH MODE CAPACITIVE PRESSURE SENSORS;

COMPUTER SIMULATION; MODELS; PARTIAL PRESSURE SENSORS; PRESSURE SENSORS; PRESSURE TRANSDUCERS;

MATHEMATICAL MODELS;

EID: 77955422097     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.04.030     Document Type: Article

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