Numerical analysis of capacitive pressure micro-sensors

Science in China, Series E: Technological Sciences

Volumn 48, Issue 2, 2005, Pages 202-213

  Wang, Xiaomin ^a   Li, Mingxuan ^a   Wang, Chenghao ^a  

^a INSTITUTE OF ACOUSTICS   (China)

Author keywords

Capacitance vs. load; Capacitive pressure micro sensor; Pseudo spectral method

Indexed keywords

ALGORITHMS; CAPACITANCE; NUMERICAL METHODS; PRESSURE SENSORS;

CAPACITIVE PRESSURE MICRO-SENSOR; MICROSENSOR DESIGN; PSEUDO-SPECTRAL METHOD;

MICROSENSORS;

EID: 34147176514     PISSN: 10069321     EISSN: 1862281X     Source Type: Journal    
DOI: 10.1360/03ye0490     Document Type: Article

References (4)

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