An analytical solution to circular touch mode capacitor

IEEE Sensors Journal

Volumn 7, Issue 4, 2007, Pages 502-505

  Daigle, Maxime ^a   Corcos, Jacques ^b   Wu, Ke ^a  

^a POLY GRAMES RESEARCH CENTER   (Canada)

^b MCGILL UNIVERSITY   (Canada)

Author keywords

Capacitive sensing; Circular diaphragm; Pressure sensor; Touch mode

Indexed keywords

CAPACITIVE SENSORS; CAPACITORS; DIAPHRAGMS; ELECTROMECHANICAL DEVICES; MEMS; PRESSURE SENSORS;

CAPACITIVE SENSING; CIRCULAR DIAPHRAGMS; CLAMPED EDGE; FINITE ELEMENTS ANALYSIS; TOUCH DOWNS; TOUCH MODE; UNIFORM LOADS;

FINITE ELEMENT METHOD;

EID: 64949186795     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2007.891996     Document Type: Article

References (4)

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3. S. Timoshenko, Theory of Plates and Shells. New York: McGraw-Hill, 1940, p. 335.
4. D. Peters, S. Berchtold, and R. Laur, "Optimized behavioral model of a pressure sensor including the touch-down effect", in Proc. 1999 Int. Conf. Modeling Simulation of Microsyst., 1999, pp. 237-240.