Inelastic contact behavior of crystalline asperities in rf MEMS devices

Journal of Engineering Materials and Technology

Volumn 131, Issue 1, 2009, Pages 0110021-01100210

  Rezvanian, O ^a   Zikry, M A ^a  

^a North Carolina State University   (United States)

Author keywords

Asperity microcontacts; Crystal plasticity; Dislocation density; Finite element modeling; Rf MEMS

Indexed keywords

CRYSTALLITES; CYCLIC LOADS; DEFORMATION; DISLOCATIONS (CRYSTALS); ELASTICITY; ELECTROMECHANICAL DEVICES; FINITE ELEMENT METHOD; HARDNESS; MEMS; NANOCRYSTALLINE MATERIALS; SINGLE CRYSTALS; SOLID STATE DEVICE STRUCTURES; STRAIN; STRAIN HARDENING; STRESS ANALYSIS; STRUCTURAL DESIGN; SURFACE ROUGHNESS; UNLOADING;

CRYSTAL PLASTICITY; DISLOCATION DENSITIES; GEOMETRICALLY NECESSARY DISLOCATION DENSITIES; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MICRO CONTACT; NANO-INDENTATION HARDNESS; RADIO FREQUENCY APPLICATIONS; RF-MEMS;

LOADING;

EID: 77955373765     PISSN: 00944289     EISSN: 15288889     Source Type: Journal    
DOI: 10.1115/1.3026545     Document Type: Conference Paper

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