Highly piezoelectric boundary waves in Si/SiO2/LiNbO3 structure

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn , Issue , 1998, Pages 484-488

  Yamaguchi, Masatsune ^a   Yamashita, Takashi ^a   Hashimoto, Ken ya ^a   Omori, Tatsuya ^a  

^a CHIBA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE TRANSMISSION; DEPOSITION; NUMERICAL ANALYSIS; PIEZOELECTRICITY; SEMICONDUCTOR DEVICE STRUCTURES; SUBSTRATES; THERMODYNAMIC STABILITY; THIN FILMS;

ELECTROMECHANICAL COUPLING FACTOR; PIEZOELECTRIC BOUNDARY WAVES; TEMPERATURE COEFFICIENT OF DELAY; TEMPERATURE COEFFICIENT OF VELOCITY;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0032312123     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)