SCOPUS 정보 검색 플랫폼

Volumn 87, Issue 9, 2010, Pages 1805-1807

Oxygen incorporation in TiN for metal gate work function tuning with a replacement gate integration approach

a IMEC (Belgium)

Author keywords

Metal gate; Replacement gate; Work function

Indexed keywords

DOPANT ACTIVATION; GATE WORK FUNCTION; INTEGRATION APPROACH; METAL GATE; OXYGEN INCORPORATION; P-TYPE; THIN TIN; WORK FUNCTION TUNING;

METALS; OXYGEN; TITANIUM NITRIDE; TUNING;

WORK FUNCTION;

EID: 77955227025 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2009.10.023 Document Type: Conference Paper

Times cited : (19)

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