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Volumn , Issue , 2010, Pages 1699-1702
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Development of novel carbon nanotube TSV technology
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Author keywords
[No Author keywords available]
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Indexed keywords
CHOICE OF FILLER MATERIALS;
DESIGN AND DEVELOPMENT;
FILLER MATERIALS;
HIGH RESISTIVITY;
INTEGRATED SYSTEMS;
CARBON NANOTUBES;
POLYSILICON;
FILLERS;
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EID: 77955191177
PISSN: 05695503
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/ECTC.2010.5490749 Document Type: Conference Paper |
Times cited : (21)
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References (14)
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