Design and fabrication of micro-cantilever beam fiber Bragg grating hydrogen sensor based on coated-palladium film

Zhongguo Jiguang/Chinese Journal of Lasers

Volumn 37, Issue 7, 2010, Pages 1784-1788

  Zhang, Xiaojing ^a   Zhang, Boming ^b   Chen, Ji'an ^a   Wu, Zhanjun ^b  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

^b HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Fiber Bragg gratings; Hydrogen sensors; Micro electronic mechanical system; Micro cantilever beam; Palladium film

Indexed keywords

HYDROGEN SENSOR; MICRO-ELECTRONIC-MECHANICAL SYSTEMS; MICROCANTILEVER BEAMS; PALLADIUM FILM; PALLADIUM FILMS;

ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; CHEMICAL SENSORS; FIBER OPTIC COMPONENTS; FIBER OPTIC SENSORS; FIBERS; HYDROGEN; MECHANICAL ENGINEERING; MECHANICS; NANOCANTILEVERS; PALLADIUM; PILE FOUNDATIONS;

FIBER BRAGG GRATINGS;

EID: 77955020366     PISSN: 02587025     EISSN: None     Source Type: Journal    
DOI: 10.3788/CJL20103707.1784     Document Type: Article

References (14)

1. M. A. Butler D. S. Ginley. Hydrogen sensing with palladium-coated optical fibers [J]. J. Appl. Phys., 1988, 64(7): 3706-3711
2. 2 M. Tabib-Azar, B. Sutapun, R. Petrick et al. Highly sensitive hydrogen sensors using palladium coated fiber optics with exposed cores and evanescent field interactions [J]. Sensors and Actuators B, 1999, 56(1-2): 158-163
3. 3 B. Chadwich, J. Tann, M. Brungs et al. Enhanced optical detection of hydrogen using the excitation of surface plasmons in palladium [J]. Appl. Surf. Sci., 1993, 68(1): 135-138
4. 4 V. Beklemyshev, V. Berezine, V. Bykov et al. Hydrogen sensors on the base of catalytic metals [C]. SPIE, 1999, 3903: 98-105
5. 5 O. L. Britton, R. L. Jones, P. I. Oden et al. Multiple-input microcantilever sensors [J]. Ultramicroscopy. 2000, 82(1): 17-21
6. 6 D.R. Baselt, B. Fruhberger E. Klaassen et al. Design and performance of a microcantilever-based hydrogen sensor [J]. Sensors and Actuators B, 2003, 88(2): 120-131
7. 7 P.J. Shaver. Bimetal strip hydrogen gas detectors [J]. Rev. Sci. Instrum., 1969, 40(7): 901-905
8. 8 S. Okuyama, Y. Mitobe, K. Matsushita. Hydrogen gas sensing using a Pd-coated cantilever [J]. Jpn. J. Appl. Phys., 2000, 39(6A): 3584-3590
9. 9 J. R. Raymond, W. C. Yong. Formulas for Stress and Strain [M]. New York: Mcgraw-Hill Inc, 5 thed, 1975. 310-311
10. Y. T. Peng, Y. Tang, J. S Sirkis. The characterization of hydrogen sensors based on palladium electroplated fiber Bragg grating [C]. SPIE, 1999, 3670: 42-53
11. S. Boonsong, T. A. Massood, K. Alex. Pd-coated elastooptic fiber optic Bragg grating sensors for multiplexed hydrogen sensing [J]. Sensors and Actuators B, 1999, 60(1): 27-34
12. Gao Bin, Ou Pan, Jia Ming et al. An innovative temperature-compensate package for fiber Bragg grating[J]. Chinese J. Lasers, 2008, 35(12): 1959-1961
13. Chen Zhe, Liu Linhe. Temperature compensation of fiber Bragg gratting based on side polishing and overlay[J]. Chinese J. Lasers. 2008, 35(6): 889-892
14. Zhang Jinlong, Yu Chongxiu, Wang Kuiru et al. Displacement sensor with temperature compensation based on chirp fiber grating[J]. Acta Optica Sinica. 2008, 28(4): 779-782