Hydrogen sensors on the base of catalytic metals

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3903, Issue , 1999, Pages 98-105

  Beklemyshev, V ^a   Berezine, V ^a   Bykov, V ^a   Kiselev, L ^a   Makhonin, I ^a   Pevgov, V ^a   Pustovoy, V ^a   Semynov, A ^a   Sencov, Y ^a   Shkuropat, I ^a   Shokin, A ^a  

^a Zelenograd Research Institute of Physical Problems   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROGEN; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; MOS DEVICES; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE TESTING;

CATALYTIC METALS; CRYOGENIC ACCELERATION BLOCK; MICROMECHANICAL TECHNOLOGY;

CHEMICAL SENSORS;

EID: 0033338658     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)