Investigation of CNT growth by substrate temperature control using thermal CVD method

Journal of Nanoscience and Nanotechnology

Volumn 10, Issue 6, 2010, Pages 3915-3918

  Sasaki, Hisashi ^a   Sasaki, Takanori ^a   Tanabu, Yoshimine ^a   Hatanaka, Shungo ^a   Fujita, Shigetaka ^a  

^a HACHINOHE INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

CNT; Metal catalyst; Nanoparticle; Thermal CVD

Indexed keywords

A-THERMAL; AFM; CARRIER GAS; FE-COATED; GROWTH CONDITIONS; METAL CATALYST; NANOPARTICLE FORMATION; OPTIMUM TEMPERATURE; SEM; SI SUBSTRATES; SUBSTRATE SURFACE; SUBSTRATE TEMPERATURE; SUBSTRATE TEMPERATURE CONTROL; SURFACE CONDITIONS; THERMAL CVD; XPS ANALYSIS;

ACETYLENE; ARGON; ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; CARBON NANOTUBES; CATALYSTS; NANOPARTICLES; SILICON; SUBSTRATES; X RAY PHOTOELECTRON SPECTROSCOPY;

SCANNING ELECTRON MICROSCOPY;

EID: 77954980793     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2010.1965     Document Type: Article

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