Constitution and mechanical properties of nanocrystalline reactive magnetron sputtered V-Al-C-N hard coatings as a function of the carbon content

Plasma Processes and Polymers

Volumn 6, Issue SUPPL. 1, 2009, Pages

  Ziebert, Carlos ^a   Albers, Ulrich ^a   Stüber, Michael ^a   Ulrich, Sven ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Combinatorial materials science; Magnetron sputtering; Nanocrystalline films; Nanoindentation; Tribology

Indexed keywords

ALN; BALL-ON-DISK; CARBON CONTENT; COMBINATORIAL MATERIALS SCIENCE; GAS FLOWS; NANOCRYSTALLINE FILMS; NANOCRYSTALLINES; R.F. MAGNETRON SPUTTERING; SUBSTRATE BIAS; TRIBOMETERS; XRD;

AERODYNAMICS; ALUMINUM; FILMS; FLOW OF GASES; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; METASTABLE PHASES; NANOCRYSTALLINE MATERIALS; NANOINDENTATION; SUBSTRATES; TRIBOLOGY;

HARD COATINGS;

EID: 77954917314     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200931303     Document Type: Conference Paper

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