Investigation of the Ru-Zr metal alloy for use as a gate electrode in NMOS devices

Journal of the Korean Physical Society

Volumn 56, Issue 5, 2010, Pages 1497-1499

  Hong, Shin Nam ^a   Park, Jong Myeon ^a  

^a Hankuk Aviation University   (South Korea)

Author keywords

Co sputtering; Gate metal; Ruthenium; Work function; Zirconium

Indexed keywords

EID: 77954841265     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.56.1497     Document Type: Article

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