Electrical resistivity and morphology of ultra thin pt films grown by dc magnetron sputtering on SiO2

Journal of Physics: Conference Series

Volumn 100, Issue PART 8, 2008, Pages

  Agustsson, J S ^a   Arnalds, U B ^b   Ingason, A S ^c   Gylfason, K B ^d   Johnsen, K ^a   Olafsson, S ^c   Gudmundsson, J T ^c  

^a Mentis Cura   (Iceland)

^b Matvice   (Iceland)

^c UNIVERSITY OF ICELAND   (Iceland)

^d ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY; FILM GROWTH; GROWTH TEMPERATURE; MAGNETRON SPUTTERING; SURFACE ROUGHNESS;

CONTINUOUS FILMS; DC MAGNETRON SPUTTERING; ELECTRICAL RESISTANCES; GRAIN SIZE; PT FILMS; SI (100) SUBSTRATE; THERMALLY OXIDIZED; ULTRA-THIN;

GRAIN GROWTH;

EID: 77954332382     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/100/8/082006     Document Type: Article

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