A novel NO2 gas sensor using dual track SAW device

Sensors and Actuators, A: Physical

Volumn 159, Issue 2, 2010, Pages 168-173

  Wena, Changbao ^a,b   Zhuc, Changchun ^c   Jua, Yongfeng ^a   Xua, Hongke ^a   Qiua, Yanzhang ^a  

^a CHANG'AN UNIVERSITY   (China)

^b Shaanxi Engineering and Technique   (China)

^c XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

Surface acoustic wave (SAW) device nitrogen dioxide (NO2) gas sensor dual track tungsten trioxide (WO3)

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; CHEMICAL SENSORS; GAS DETECTORS; GASES; NETWORK ARCHITECTURE; NITROGEN COMPOUNDS; NITROGEN OXIDES; TUNGSTEN;

BULK ACOUSTIC WAVES; EXTERNAL PERTURBATIONS; MORLET WAVELET FUNCTION; MULTISTRIP COUPLERS; NITROGEN DIOXIDES; POLY VINYL PYRROLIDONE; RESPONSE CHARACTERISTIC; SURFACE ACOUSTIC WAVES;

NITROGEN;

EID: 77954315824     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.03.012     Document Type: Article

References (28)

1. G. Zamboni, M. Capobianco, E. Daminelli, Estimation of road vehicle exhaust emissions from 1992 to 2010 and comparison with air quality measurements in Genoa, Italy, Atmos. Environ. 43 (2009) 1086-1092.
2. E. Hawe, C. Fitzpatrick, P. Chambers, G. Dooly, E. Lewis, Hazardous gas detection using an integrating sphere as a multipass gas absorption cell, Sens. Actuators A 141 (2008) 414-421.
3. A. Richter, J.P. Burrows, H. Nuc, C. Granier, U. Niemeier, Increase in tropospheric nitrogen dioxide over China observed from space, Nature 437 (2005) 129-132.
4. O.C. Jeong, S. Konishi, Three-dimensionally combined carbonized polymer sensor and heater, Sens. Actuators A 143 (2008) 97-105.
5. G. Hoek, B. Brunekreef, P. Fischer, J. vanWijnen, The association between air pollution and heart failure, arrhythmia, embolism, thrombosis, and other cardiovascular causes of death in a time series study, Epidemiology 12 (2001) 355-357.
6. K. Wierzbowska, L. Bideux, B. Adamowicz, A. Pauly, A novel III-V semiconductor material for NO2 detection and monitoring, Sens. Actuators A 142 (2008) 237-241.
7. C. Zamani, K. Shimanoe, N. Yamazoe, A new capacitive-type NO2 gas sensor combining an MIS with a solid electrolyte, Sens. Actuators B 109 (2005) 216-220.
8. A. Venema, E. Nieuwkoop, M.J. Vellekoop, W.J. Ghijsen, A.W. Barendsz, M.S. Nieuwenhuizen, NO2 gas-concentration measurement h a SAWchemosensor, IEEE Trans. Ultrason. Ferroelect. Freq. Contr. UFFC 34 (1987) 149-156.
9. C. Caliendo, P. Verardi, E. Verona, A.D. Amico, C.D. Natale, G. Saggio, M. Serafini, R. Paolesse, S.E. Huq, Advances in SAW-based gas sensors, Smart Mater. Struct. 6 (1997) 689-699.
10. A. Sadek, C.O. Baker, D.A. Powell, W. Wlodarski, R.B. Kaner, K. Kourosh, Polyaniline nanofiber based surface acoustic waves gas sensors-effect of nanofiber diameter on H2 response, IEEE Sensors J. 7 (2007) 213-218.
11. A. Mauder, SAW gas sensors: comparison between delay line and two port resonator, Sens. Actuators B 26 (1995) 187-190.
12. V.I. Anisimkin, I.M. Kotelyanskii, V.I. Fedosov, C. Caliendo, P. Verardi, E. Verona, Analysis of the different contributions to response of SAW gas sensors, in: Proceedings of the IEEE Ultrasonics Symposium, vol. 1, 1995, pp. 515-518.
13. A.A. Oliner, Acoustic Surface Waves, Springer-Verlag, New York, 1978.
14. A.J. Ricco, S.J. Martin, Thin metal film characterization and chemical sensors: monitoring electronic conductivity, mass loading and mechanical propertieswith surface acoustic wave devices, Thin Solid Films 206 (1991) 94-101.
15. B.A. Auld, Acoustic Fields and Waves in Solid, Wiley, New York, 1973.
16. E. Benes, M. Groschl, F. Seifert, A. Pohl, Comparison between BAW and SAW sensor principles, IEEE Trans. Ultrason. Ferroelect. Freq. Contr. 45 (1998) 1314-1330.
17. H. Becker, C. Rupp, M.V. Schickfus, S. Hunklinger, Multistrip couplers for surface acoustic wave sensor application, IEEE Trans. Ultrason. Ferroelect. Freq. Contr. 43 (1996) 527-530.
18. H. Xia, Y. Wang, F. Kong, S. Wang, B. Zhu, X. Guo, J. Zhang, Y. Wang, S. Wu, Au-doped WO3-based sensor for NO2 detection at low operating temperature, Sens. Actuators B 134 (2008) 133-139.
19. J. Kaur, S.C. Roy, M.C. Bhatnagar, Highly sensitive SnO2 thin film NO2 gas sensor operating at low temperature, Sens. Actuators B 123 (2007) 1090-1095.
20. M. Penza, G. Cassano, F. Tortorella, Gas recognition by activated WO3 thin-film sensors array, Sens. Actuators B 81 (2001) 115-121.
21. C. Wen, C. Zhu, Y. Ju, Y. Qiu, H. Xu, W. Lu, X. Hu, Y. Wu, J. Liu, Dual track architecture and time synchronous scheme for wavelet reconstruction processor using SAW device based on MSC, Sens. Actuators A 147 (2008) 222-228.
22. C. Wen, C. Zhu, Time synchronous dyadic wavelet processor array using surface acoustic wave devices, Smart Mater. Struct. 15 (2006) 939-945.
23. T. Takahashi, J. Tanabe, N. Yamada, H. Nakabayashi, Influence of working gas pressure on structure and properties of WO3 films reactively deposited by rf magnetron sputtering, J. Vacuum Sci. Technol. A 21 (2003) 1414-1418.
24. M. Gillet, R. Delamare, E. Gillet, Growth, structure and electrical properties of tungsten oxide nanorods, Eur. Phys. J. D 34 (2005) 291-294.
25. R.E. Tanner, A. Szekeres, D. Gogova, K. Gesheva, Study of the surface roughness of CVD-tungsten oxide thin films, Appl. Surf. Sci. 218 (2003) 162-168.
26. J.V. Knuuttila, J.J. Vartiainen, J. Koskela, V.P. Plessky, C.S. Hartmann, M.M. Salomaa, Bulk-acoustic waves radiated from low-loss surface-acoustic-wave resonators, Appl. Phys. Lett. 84 (2004) 1579-1581.
27. F.G. Marshall, C.O. Newton, E.G.S. Paige, Theory and design of the surface acoustic wave multistrip coupler, IEEE Trans. Microw. Theory Tech. A 21 (1973) 206-215.
28. D.P. Morgan, Surface-Wave Devices for Signal Processing, Elsevier Science Publisher, Netherlands, 1985.