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Volumn 218, Issue 1-4, 2003, Pages 163-169

Study of the surface roughness of CVD-tungsten oxide thin films

Author keywords

Atomic force microscopy; Morphology and growth; Surface; Tungsten oxide

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; PYROLYSIS; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS; TUNGSTEN COMPOUNDS;

EID: 0041692927     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00575-0     Document Type: Article
Times cited : (20)

References (16)
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  • 9
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.