Integration of a MEMS based safe arm and fire device

Sensors and Actuators, A: Physical

Volumn 159, Issue 2, 2010, Pages 157-167

  Pezousa, Hélène ^b   Rossia, Carole ^a,b   Sancheza, Marjorie ^b   Mathieua, Fabrice ^b   Dollata, Xavier ^b   Charlota, Samuel ^b   Salvagnaca, Ludovic ^b   Conédéraa, Véronique ^b  

^a LAAS CNRS   (France)

^b UNIVERSITÉ PAUL SABATIER   (France)

Author keywords

MEMS micro initiator; Pyrotechnical microactuator; Safe arm and fire

Indexed keywords

ACTUATORS; SENSORS;

ELECTRICAL SAFETY; MECHANICAL ARM;

FIRES;

EID: 77954312508     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.03.017     Document Type: Article

References (50)

1. C. Rossi, D. Briand, M. Dumonteuil, T. Camps, P.Q. Pham, N.F. de Rooij, Matrix of 10-10 addressed solid propellant microthrusters: review of the technologies, Sensors and Actuators A: Physical 126 (1) (2006) 241-252.
2. D.W. Youngner, S.T. Lu, E. Choueiri, J.B. Neidert, R.E. Black III, K.J. Graham, D. Fahey, R. Lucus, and X. Zhu, MEMS Mega-pixel Micro-thruster Arrays for Small Satellite Stationkeeping, Proceedings of the 14th Annual AIAA/USU Conference on Small Satellites, AIAA Paper SSC00-X-2, August 21-24, 2000.
3. D.H. Lewis Jr., S.W. Janson, R.B. Cohen, E.K. Antonsson, Digital micropropulsion, Sensors and Actuators A: Physical 80 (2000) 143-154.
4. D. Teasdale, V. Milanovic, P. Chang, K. Pister, Microrockets for smart dust, Smart Materials and Structure 10 (2001) 1145-1155.
5. W. Lindsay, D. Teasdale, V. Milanovic, K. Pister, C.F. Pello, Thrust and electrical power from solid propellant microrockets, in: Technical Digest of the 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001), Piscataway, USA, 2001, pp. 606-610.
6. K. Takahashi, H. Ebisuzaki, H. Kajiwara, T. Achiwa, and K. Nagayama, Design and Testing of Mega-bit Microthruster Arrays, presented at the Nanotech, Houston, TX, Sep. 9-12, 2002, Paper AIAA 2002-5758.
7. S. Tanaka, R. Hosokawa, S. Tokudome, K. Hori, H. Saito, M. Watanabe, M. Esashi, MEMS-based solid propellant rocket array thruster with electrical feedthroughs, Transactions of the Japan Society for Aeronautical and Space Science 46 (2003) 47-51.
8. P.Q. Pham, D. Briand, C. Rossi, N.F. De Rooij, Downscaling of solid propellant pyrotechnical microsystems, in: Proceedings of the 12th International Conference on Solid-State Sensors and Actuators (Transducers-03), June 8-12, Boston, USA, 2003, pp. 1423-1426.
9. Y. Zhao, B.A. English, Y. Choi, H. DiBiaso, G. Yuan, M.G. Allen, Polymeric microcombustors for solid-phase conductive fuels, in: Proceedings of the 17th IEEE International Conference on Micro Electro Mechanical Systems, (MEMS 2004), January 25-29, Maastricht, Netherlands, 2004, pp. 498-501.
10. K.L. Zhang, S.K. Chou, S.S. Ang, X.S. Tang, A MEMS-based solid propellant microthruster with Au/Ti igniter, Sensors and Actuators A: Physical 122 (1) (2005) 113-123.
11. ponents and Technology Conference, May 29-June 1, Florida, USA, 2001.
12. H. DiBiaso, B.A. English, M.G. Allen, Solid-phase conductive fuels for chemical microactuators, Sensors and Actuators A: Physical 111 (2-3) (2004) 260-266.
13. H. Laucht, H. Bartuch, D. Kovalev, Silicon initiator, from the idea to functional tests, in: Proceedings of the 7th International Symposium and Exhibition on Sophisticated Car Occupant Safety Systems, 2004.
14. A. Hofmann, H. Laucht, D. Kovalev, V.Yu. Timoshenko, J. Diener, N. Kunzner, E. Gross, Explosive composition and its use, US Patent, Patent No.: 0072502 A1, 2005.
15. T.W. Barbee, R.L. Simpson, A.E. Gash, and J.H. Satcher, Nano-laminate-based ignitors, US Patent, Patent No: WO 2005016850 A2, 2005.
16. J.C. Hinshaw, Thermite compositions for use as gas generants, International Patent, Patent No: WO 95/04672, 1995.
17. C. Rossi, D. Estève, C. Mingués, Pyrotechnic actuator: anewgeneration of Si integrated actuator, Sensors and Actuators A: Physical 74 (1-3) (1999) 211-215.
18. C.C. Hong, S. Murugesan, G. Beaucage, J.W. Choi, C.H. Ahn,AFunctioning on-chip pressure generator using solid chemical propellant for disposable lab-on-achip, Lab-on-a-Chip 3 (4) (2003) 281-286
19. A.A. Norton, M.A. Minor, Pneumatic microactuator powered by the deflagration of sodium azide, Journal of Microelectromechanical Systems 15 (2) (2006) 344-354.
20. Patent FR2 818 808, Pile à combustible pour l-alimentation d-appareils électroniques, notamment portables. (in French).
21. O. Vasylkiv, Y. Sakka, Nanoexplosion synthesis of multimetal oxide ceramic nanopowders, Nano Letters 5 (12) (2005) 2598-2604.
22. O. Vasylkiv, Y. Sakka, V.V. Skorokhod, Nano-blast synthesis of nano-size CeO2-Gd2O3 powders, Journal of the American Ceramic Society 89 (6) (2006) 1822-1826.
23. D.S. Stewart, Miniaturization of explosive technology and microdetonics, in: Proceedings of 21st the International Conference of Theoretical and Applied Mechanics (ICTAM04), August 15-21, Varsaw, Poland, 2004.
24. P. Pennarun, C. Rossi, D. Estève, D. Bourrier, Design, fabrication and characterization of aMEMS safe pyrotechnical igniter integrating arming, disarming and sterilization functions, Journal of Micromechanics and Microengineering 16 (1) (2006) 92-100.
25. S. Phelep, T. Nguyen, Method of producing an electro-pyrotechnic interface between an electrothermal bridge and a primary composition inside an initiator, WO Patent number 2006/051199A1, 2006.
26. F.N. Mandigo, G.C. Mei, J.C. Fister, Semiconductor bridge (SCB) packaging system, US Patent number 5,029,529, 1991. 8] P. Wilson, K.L. Gray, Non-explosive two component initiator, EP Patent number 1 662 224 A1, 2005.
27. C. Rivière, E. Poulard, Initiateur électro-pyrotechnique sécurisé à haute énergie, EP Patent number 1 172 628 A2, 2001.
28. W. Smetana, R. Reicher, M. Mundlein, J. Nicolics, H. Homolka, Thick film initiator elements-an alternative to resistive wire initiators for automotive safety units, in: 26th International Spring Seminar on Electronics Technology, May 8-11,2003, Star& Lesni, Slovak Republic, 2003.
29. M. Park, H. Choo, S. Yoo, C.O. Park, Comparison of plasma generation behaviors between a single crystal semiconductor bridge and a polysilicon semiconductor bridge, Sensors and Actuators A 115 (2004) 104-108.
30. R. L. Allen, Safe arm initiator, US Patent number 3,658,009, 1972.
31. H.L. Grant, A. Djidics, Electric detonator, US Patent number 1,516,009, 1924.
32. L.H. Johnston, Electric initiator with exploding bridge wire, Patent number 3,040,660, 1962.
33. K. F. Hodge, D. H. Lewis Jr, S. D. Nelson, V.W. Ruwe, MEMS arm fire and safe and arm devices, US Patent number 6,431,071, 2002.
34. W.H. Maurer, GH. Soto, D.R. Hollingsworth, MEMS Safe Arm device for microdetonation, US Patent number 7,040,234, 2006.
35. M. Belgerian, J. C. Depeigne, M. Vincent, Dispositif de sécurité et d-armement de charges militaires, European Patent number 0 463 974 A1, 1991.
36. P. Magnan, R. Lafont, Pyrotechnic safety device of reduced dimensions, US Patent number 7,490,553, 2009.
37. W.O. Maruska, M.A. Bayerkohler, Safing and arming mechanism, US Patent number 4,770,096, 1988.
38. M. Worthington, Safety and arming apparatus and method for a munition, US Patent number 7,258,068, 2007.
39. C.H. Robinson, R.H. Wood, T.Q. Hoang, Miniature MEMS-based electromechanical safety and arming device, US Patent number 6,964,231, 2005.
40. C.H. Robinson, R.H. Wood, M.R. Gelak, D. Hollingsworth, Micro-scale firetrain for ultra-miniature electro-mechanical safety and arming device, US Patent number 7,055,437, 2006.
41. D.L. Jean, MEMS resettable timer, US Patent number 7,398,734, 2008.
42. J.D. Titus, P.E. Hall, Electro-explosive safety and arming device, US Patent number 4,691,634, 1987.
43. D.S. Lenko, T.P. Frederick, Miniature, low power, electromechanical safety and arming device, US Patent number 5,594,195, 1997.
44. R. Buxton, Multi-circuit safing and arming switch, US Patent number 3,771,457, 1973.
45. W.J. Donahue, D.L. Blanchard, J.M. Wack, Fuze arming device, US Patent number 3,670,656, 1972.
46. R.E. Edminster, Safe and arm device, US Patent number 5,016,532, 1991.
47. D.L. Ramstad, Safe and arm device, US Patent number 3,951,036, 1976.
48. C. Rossi, D. Estève, Micropyrotechnics, a new technology for making energetic microsystems: review and prospective, Sensors and Actuators A120/2 (2005) 297-310.
49. www.sceram.com/macor.html.
50. http://www.epotek.com/SSCDocs/msds/H70E-175msds.PDF.