AlN periodic multilayer structures grown by MOVPE for high quality buffer layer

Materials Research Society Symposium Proceedings

Volumn 1202, Issue , 2010, Pages 191-196

  Kuryatkov, V V ^a   Feng, W ^a   Pandikunta, M ^a   Rosenbladt, D ^a   Borisov, B ^a   Nikishin, S A ^a   Holtz, M ^a  

^a TEXAS TECH UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; ALN LAYERS; CONTINUOUS-FLOW; CRACK FREE; CRYSTAL QUALITIES; HIGH QUALITY; HIGH TEMPERATURE; LOW-PRESSURE METAL-ORGANIC VAPOR PHASE EPITAXIES; MOVPE; PERIODIC MULTILAYERS; SMOOTH SURFACE; V/III RATIO;

AMMONIA; CRYSTAL GROWTH; ENERGY CONVERSION; METALLORGANIC VAPOR PHASE EPITAXY; MULTILAYERS; NITRIDES; ORGANOMETALLICS; SCREW DISLOCATIONS;

PERIODIC STRUCTURES;

EID: 77954193920     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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