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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7683, Issue , 2010, Pages

Structural, surface, optical, and mechanical properties of Zn 3N2 thin films prepared by sputtering deposition

(4) Wen, Ting a Jiang, Nanke b Georgiev, Daniel G b Jayatissa, Ahalapitiya H a

a UNIVERSITY OF TOLEDO (United States)

b Toledo (United States)

Author keywords

band gap; mechanical properties; sputtering; x ray diffraction; zinc nitride

Indexed keywords

ABSORPTION COEFFICIENTS; BAND GAP; BAND GAPS; GAS COMPOSITIONS; IMPURITY DOPING; NITRIDE FILMS; OPTICAL AND ELECTRONIC PROPERTIES; OXYNITRIDES; P-TYPE BEHAVIORS; PHOTON ENERGY RANGE; RF-MAGNETRON SPUTTERING; SPUTTERING DEPOSITION; UV-VISIBLE; VISIBLE REGION; ZINC OXIDE THIN FILMS;

ABSORPTION SPECTROSCOPY; BIOMECHANICS; DEPOSITION; ELECTRONIC PROPERTIES; ENERGY GAP; ENERGY HARVESTING; GAS ABSORPTION; HARVESTING; LIGHT EMITTING DIODES; MAGNETRON SPUTTERING; NITRIDES; OPTICAL PROPERTIES; OXIDE FILMS; PHOTONIC DEVICES; SOLAR CELLS; THIN FILMS; VAPOR DEPOSITION; X RAY DIFFRACTION; ZINC; ZINC OXIDE;

MECHANICAL PROPERTIES;

EID: 77953778900 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.850844 Document Type: Conference Paper

Times cited : (4)

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