Novel capacitive pressure sensor

Journal of Microelectromechanical Systems

Volumn 19, Issue 3, 2010, Pages 443-450

  Bakhoum, Ezzat G ^a   Cheng, Marvin H M ^b  

^a UNIVERSITY OF WEST FLORIDA   (United States)

^b GEORGIA SOUTHERN UNIVERSITY   (United States)

Author keywords

Capacitive pressure sensors; Sensors

Indexed keywords

ALUMINUM ELECTRODES; CAPACITIVE PRESSURE SENSORS; ELECTRODE AREAS; HIGH SENSITIVITY; MERCURY DROP; MICRO-ELECTRO-MECHANICAL; PARALLEL PLATE CAPACITORS; SURFACE AREA; THICK LAYERS;

BARIUM; BARIUM STRONTIUM TITANATE; BARIUM TITANATE; CAPACITANCE; CAPACITORS; CORRUGATED METAL; ELECTROSTATIC ACTUATORS; MERCURY (METAL); PRESSURE SENSORS; PRESSURE TRANSDUCERS; STRONTIUM; STRONTIUM TITANATES;

PARTIAL PRESSURE SENSORS;

EID: 77953607351     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2047632     Document Type: Article

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