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Volumn 86, Issue 8, 1998, Pages 1534-1535
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Microelectromechanical systems
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTUATORS;
COMPUTER AIDED DESIGN;
COMPUTER SOFTWARE;
INFORMATION TECHNOLOGY;
INTEGRATED CIRCUIT LAYOUT;
MICROELECTRONIC PROCESSING;
SEMICONDUCTOR DEVICE MANUFACTURE;
SENSORS;
TECHNOLOGY;
VLSI CIRCUITS;
INFORMATION SYSTEMS;
MICROELECTROMECHANICAL SYSTEMS;
VLSI ELECTROMECHANICS;
MICROELECTROMECHANICAL DEVICES;
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EID: 0032141809
PISSN: 00189219
EISSN: None
Source Type: Journal
DOI: 10.1109/5.704257 Document Type: Article |
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Times cited : (24)
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References (0)
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