Effect of defect accumulation on ion-beam damage morphology by electronic excitation in lithium niobate: A MonteCarlo approach

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 268, Issue 13, 2010, Pages 2249-2256

  Rivera, A ^a   Crespillo, M L ^b   Olivares, J ^b,c   Garcia G ^d   Agullo Lopez F ^b,e  

^a INSTITUTO DE MICROELECTRÓNICA DE MADRID   (Spain)

^b CENTRO DE MICROANÁLISIS DE MATERIALES   (Spain)

^c INSTITUTO DE ÓPTICA   (Spain)

^d ALBA SYNCHROTRON LIGHT SOURCE   (Spain)

^e UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

Author keywords

Amorphization threshold; Damage; Excitons; Ion beams; MonteCarlo simulations; Rutherford backscattering channeling; Thermal spike

Indexed keywords

AMORPHIZATION; CRYSTALLINE MATERIALS; EXCITONS; ION BOMBARDMENT; IONS; LITHIUM; LITHIUM COMPOUNDS; MONTE CARLO METHODS; MORPHOLOGY; NIOBIUM COMPOUNDS; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

CRYSTAL SURFACES; CRYSTALLINE LAYERS; DAMAGE; DAMAGE MORPHOLOGY; DEFECT ACCUMULATION; ELECTRONIC EXCITATION; RUTHERFORD BACKSCATTERING CHANNELING; THERMAL SPIKES;

ION BEAMS;

EID: 77953137900     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2010.03.031     Document Type: Article

References (33)

1. Rivera A., Olivares J., García G., Cabrera J.M., Agulló-Rueda F., and Agulló-López F. Phys. Status Solidi A 206 6 (2009) 1109
2. Toulemonde M., Assman W., Dufour C., Meftah A., Studer F., and Trautmann C. In: Sigmund P. (Ed). Ion Beam Science: Solved and Unsolved Problems (1996), The Royal Danish Academy of Sciences and Letters, Copenhagen 263
3. Olivares J., García G., Agulló-López F., Agulló-Rueda F., Kling A., and Soares J.C. Appl. Phys. A 81 (2005) 1465
4. Bentini G.G., Bianconi M., Correra L., Chiarini M., Mazzoldi P., Sada C., Argiolas N., Bazzan M., and Guzzi R. J. Appl. Phys. 96 (2004) 242
5. García-Navarro A., Olivares J., García G., Agulló-López F., García-Blanco S., Merchant C., and Stewart Aitchison J. Nucl. Instrum. Meth. Phys. Res. B 249 (2006) 177
6. Jensen J., Supinski M., Hjort K., and Sanz R. Nucl. Instrum. Meth. Phys. Res. B 266 (2008) 3113
7. Kamarou A., Wesch W., Wendler E., Undisz A., and Rettenmayr M. Phys. Rev. B 73 (2007) 184107
8. Schnor C.S., Kluth P., Byrne A.P., Foran C.J., and Ridway M.C. Phys. Rev. B 77 (2008) 073204
9. Olivares J., García-Navarro A., García G., Agulló-López F., Agulló-Rueda F., García-Cabañes A., and Carrascosa M. J. Appl. Phys. 101 (2007) 33512
10. J.F. Ziegler, J.P. Biersack, U. Littmark, The Stopping and Ranges of Ions in Solids, Pergamon Press, New York, 1985, see also the SRIM webpage, .
11. Ziegler J.F. Ion Implantation Technology (1992), North Holland, Amsterdam
12. Townsend P.D., Chandler P.J., and Zhang L. Optical Effects of Ion Implantation (1994), Cambridge University Press, Cambridge
13. Agulló-López F., Méndez A., García G., Olivares J., and Cabrera J.M. Phys. Rev. B 74 (2006) 174109
14. Rivera A., Méndez A., García G., Olivares J., Cabrera J.M., and Agulló-López F. J. Lumin. 128 (2008) 703
15. Toulemonde M., Dufour Ch., Meftah A., and Paumier E. Nucl. Instrum. Meth. Phys. Res. B 166/167 (2000) 903
16. Toulemonde M., Trautmann C., Balanzat E., Hjort K., and Weidinger A. Nucl. Instrum. Meth. Phys. Res. B 1 (2004) 216
17. Meftah A., Costantini J.M., Khalfaoui N., Boudjadar S., Stoquert J.P., Studer F., and Toulemonde M. Nucl. Instrum. Meth. Phys. Res. B 237 (2005) 563
18. Szenes G. Phys. Rev. B 60 (1999) 3140
19. Fleischer R.L., Price P.B., and Walker R.M. Nuclear Tracks in Solids. Principles and Applications (1975), University of California Press, Berkeley
20. Spohr R. In: Bethge K. (Ed). Ion Tracks and Microtechnology: Basic Principles and Applications (1990), Vieweg, Braunschweig
21. Itoh N. Nucl. Instrum. Meth. Phys. Res. B 135 (1998) 175
22. Canut B., Ramos S.M.M., Brenier R., Thevenard P., Loubet J.L., and Toulemonde M. Nucl. Instrum. Meth. Phys. Res. B 107 (1996) 194
23. García-Navarro A., Bianconi M., Olivares J., Agulló-López F., and García G. J. Appl. Phys. 101 (2007) 83506
24. García G., Olivares J., Agulló-López F., García-Navarro A., Agulló-Rueda F., García-Cabañes A., and Carrascosa M. Europhys. Lett. 76 (2006) 1123
25. Agulló-López F., Catlow R.C., and Townsend P.D. Point Defects in Materials (1984), Academic Press, London
26. Itoh N., and Stoneham A.M. Materials Modification by Electronic Excitation (2001), Cambridge University Press
27. Waligorski M.P.R., Hamm R.N., and Katz R. Nucl. Tracks Radiat. Meas. 11 (1986) 309
28. Fecht H.J. Nature 356 (1992) 133
29. García-Navarro A., Méndez A., Olivares J., García G., Agulló-López F., Zayat M., Levy D., and Vazquez L. Nucl. Instrum. Meth. Phys. Res. B 249 (2006) 172
30. Rivera A., Olivares J., Crespillo M.L., García G., Bianconi M., and Agulló-López F. Nucl. Instrum. Meth. Phys. Res. B 267 (2009) 1460
31. Meftah A., Brisard F., Constantini J.M., Hage-Ali M., Stoquert J.P., Studer F., and Toulemonde M. Phys. Rev. B 48 (1993) 920
32. Szenes G. Phys. Rev. 52 (1995) 6154
33. Olivares J., García-Navarro A., García G., Agulló-López F., Agulló-Rueda F., García-Cabañes A., and Carrascosa M. J. Appl. Phys. 101 (2007) 033512