Development of fine-particle plasma systems for basic and applied research

Plasma Sources Science and Technology

Volumn 19, Issue 3, 2010, Pages

  Hayashi, Yasuaki ^a   Imano, Masayoshi ^a   Mizobata, Yohei ^a   Takahashi, Kazuo ^a  

^a KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BASIC AND APPLIED RESEARCH; BASIC RESEARCH; FINE PARTICLES; FINE-PARTICLE PLASMA; GENERATION AND GROWTH; HOT-FILAMENT; MAGNETRON PLASMAS; MASS SPECTROSCOPY; NANO-CARBON; PLASMA CHEMICAL VAPOR DEPOSITION; PLASMA PRODUCTION; PLASMA SYSTEMS; SELF BIAS VOLTAGE; SYNTHESIS PROCESS; SYNTHESIZED CARBON;

CARBON NANOTUBES; MAGNETRONS; MASS SPECTROMETRY; PLASMA DEPOSITION; PLASMA DEVICES; PLASMA THEORY; RAMAN SPECTROSCOPY; RESEARCH; SCANNING ELECTRON MICROSCOPY; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY;

SINGLE-WALLED CARBON NANOTUBES (SWCN);

EID: 77952989582     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/19/3/034019     Document Type: Article

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