Gas phase syntheses of single-walled carbon nanotubes by chemical vapor deposition using hot filament and plasma

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 43, Issue 10 A, 2004, Pages

  Hayashi, Yasuaki ^a   Shinawaki, Atsuhiro ^a   Nishino, Shigehiro ^a   Tanaka, Yoshihisa ^b   Morita, Mutsuaki ^b  

^a KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

^b LESCA Corporation   (Japan)

Author keywords

Carbon nanotube; CVD; Dusty plasma; Fine particle; Hot filament; Plasma; Single walled carbon nanotube

Indexed keywords

CATALYSTS; CHEMICAL VAPOR DEPOSITION; ELECTRONIC EQUIPMENT; ETHYLENE; PLASMA APPLICATIONS; PLASMAS; SYNTHESIS (CHEMICAL); VAPORIZATION;

DUSTY PLASMAS; FINE PARTICLE; HOT FILAMENTS; PLASMA; SINGLE WALLED CARBON NANOTUBES;

CARBON NANOTUBES;

EID: 10444243305     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.L1237     Document Type: Article

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