Development of ion sources from ionic liquids for microfabrication

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 28, Issue 3, 2010, Pages

  Perez Martinez, Carla ^a   Guilet, St́phane ^b   Gogneau, Nolle ^b   Jegou, Pascale ^c   Gierak, Jacques ^b   Lozano, Paulo ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b UNIV PARIS SUD   (France)

^c DIF   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ION SOURCES; IONIZATION OF LIQUIDS; IONS; MICROANALYSIS; MICROFABRICATION; MICROMACHINING;

IONIC LIQUID ION SOURCES; PATTERNED SUBSTRATES; REACTIVE ION; SILICON STRUCTURES; SOURCE GEOMETRY; STABLE EMISSIONS;

IONIC LIQUIDS;

EID: 77952984904     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.3432125     Document Type: Conference Paper

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