The use of ionic liquid ion sources in focused ion beam applications

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 6, 2008, Pages 2097-2102

  Zorzos, Anthony N ^a   Lozano, Paulo C ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT LEVELS; ENERGY DEFICITS; IONIC LIQUID ION SOURCES; LIQUID METAL ION SOURCES; MOLECULAR IONS; MONOENERGETIC; NANOAMPERES; NEGATIVE ION BEAMS; TEMPERATURE MOLTEN;

BEAM PLASMA INTERACTIONS; ELEMENTARY PARTICLE SOURCES; FOCUSED ION BEAMS; FUSED SALTS; ION BEAMS; ION BOMBARDMENT; ION SOURCES; IONIC CONDUCTION; IONIC LIQUIDS; IONIZATION OF LIQUIDS; LIQUID METALS; LIQUIDS; METAL IONS;

IONS;

EID: 57249094111     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2991619     Document Type: Article

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