Development and characterization of an iodine field emission ion source for focused ion beam applications

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 6, 2009, Pages 2648-2653

  Fedkiw, Timothy P ^a   Lozano, Paulo C ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANGULAR INTENSITY; EMISSION CHARACTERISTICS; ENERGY DISTRIBUTIONS; HIGH ELECTRIC FIELDS; ION SPECIES; IONIC LIQUID ION SOURCES; LOW TEMPERATURES; REACTIVE SPECIES; RETARDING POTENTIAL ANALYZER; ROOM-TEMPERATURE MOLTEN SALTS; TIME-OF-FLIGHT MASS SPECTROMETERS;

ANGULAR DISTRIBUTION; ELECTRIC FIELDS; ELECTRIC POWER DISTRIBUTION; FIELD EMISSION; FOCUSED ION BEAMS; FUSED SALTS; INDUSTRIAL CHEMICALS; IODINE; ION SOURCES; IONIZATION OF LIQUIDS; LIQUID METALS; MASS SPECTROMETERS; MASS SPECTROMETRY; METAL IONS; NEGATIVE IONS; SMELTING;

IONIC LIQUIDS;

EID: 72849137290     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3253604     Document Type: Conference Paper

References (20)

1. T. Welton, Chem. Rev. (Washington, D.C.) 99, 2071 (1999).
2. M. Ue, M. Takeda, A. Toriumi, A. Kominato, R. Hagiwara, and Y. Ito, J. Electrochem. Soc. 150, A499 (2003).
3. M. Gamero-Castao and V. Hruby, J. Propul. Power 17, 977 (2001).
4. I. Romero, R. Bocanegra, J. Fernandez de la Mora, and M. Gamero-Castano, J. Appl. Phys. 94, 3599 (2003).
5. P. Lozano and M. Martinez-Sanchez, J. Colloid Interface Sci. 280, 149 (2004).
6. P. Lozano and M. Martinez-Sanchez, J. Colloid Interface Sci. 282, 415 (2005).
7. S. Castro and J. Fernandez de la Mora, J. Appl. Phys. 105, 034903 (2009).
8. G. I. Taylor, Proc. R. Soc. London 383, 383 (1964).
9. P. Lozano, J. Phys. D 39, 126 (2006).
10. C. Larriba, S. Castro, J. Fernandez de la Mora, and P. Lozano, J. Appl. Phys. 101, 084303 (2007).
11. S. Castro, C. Larriba, J. Fernandez de la Mora, P. Lozano, S. Sümer, Y. Yoshida, and G. Saito, J. Appl. Phys. 102, 094310 (2007).
12. N. Takahashi, A. N. Zorzos, and P. C. Lozano, in Proceedings of the 2008 Joint Symposium on Molten Salts (Molten Salt Committee, The Electrochemical Society of Japan, Kobe, Japan, 2008), p. 599.
13. A. Zorzos and P. Lozano, J. Vac. Sci. Technol. B 26, 2097 (2008).
14. J. Orloff, L. Swanson, and M. Utlaut, High Resolution Focused Ion Beams: FIB and Applications (Springer, New York, 2002).
15. J. G. Huddleston, A. E. Visser, W. M. Reichert, H. D. Willauer, G. A. Broker, and R. D. Rogers, Green Chem. 3, 156 (2001).
16. J. Zhou, W. Ens, and K. G. Standing, Int. J. Mass Spectrom. Ion Process. 146, 139 (1995).
17. A. Zorzos, SM thesis, MIT, 2009.
18. Y. Zou et al., Phys. Rev. ST Accel. Beams 5, 072801 (2002).
19. C. L. Enloe and J. R. Shell, Rev. Sci. Instrum. 63, 1788 (1992).
20. N. Takahashi and P. Lozano, The 44th Joint Propulsion Conference and Exhibit, Hartford, CT, 2008 (unpublished).