Efficient reliability-based design optimization for microelectromechanical systems

IEEE Sensors Journal

Volumn 10, Issue 8, 2010, Pages 1383-1390

  Engesser, Manuel ^a   Buhmann, Alexander ^a   Franke, Axel R ^a   Korvink, Jan G ^b  

^a ROBERT BOSCH GMBH   (Germany)

^b UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Microelectromechanical systems (MEMS); Reliability based design optimization (RBDO); Robust design optimization (RDO); Sigma point (SP); Six Sigma design; Unscented transformation (UT)

Indexed keywords

MICROELECTROMECHANICAL SYSTEMS; RELIABILITY-BASED DESIGN OPTIMIZATION; ROBUST DESIGN OPTIMIZATION; SIGMA-POINT (SP); SIX-SIGMA;

COMPOSITE MICROMECHANICS; MACHINE DESIGN; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MINIATURE INSTRUMENTS; MOORING; PROCESS MONITORING; RELIABILITY;

OPTIMIZATION;

EID: 77952923657     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2010.2044171     Document Type: Article

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